KJ

Weight Color of release button Model KDM10-01 KDM10-03 KDM10-07 No. of connecting tubes 1 8 5 32 1 4 5 16 1 8 5 32 1 4 5 16 300 g 10 Red KDM10-09 520 g KDM20-01 20 KDM20-03 520 g KDM20-07 KDM20-09 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

VZA2000

Function Port size Rc Valve model VHS VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

•

Changeable Range 01 Tie Rod Length (mm) Model' CS2 Bore-size 125 ' 140 160 Mounling brack.1 L 1!I, I'i q , C"D, T L I B, F, G, 'C, 0 , T L IB, F, G, C, 0, T ' -Mminimum 20 1 12 21 1 12 23 1 14 M.ro' axirourn . 270 rn 3 o o ~ n '5. ::J C.

KG

(mm) Weight (g) Note) D Applicable tubing Applicable tubing KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 15.5 13 16 19 16.5 20 18 17 4 4.1 4 2.5 19 23 20 9.5 9.8 11.5 11.8 13.8 4 2.6 8 3.6 4 M5 x 0.8 4 1 8 3 2.5 M5 x 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5

Table of Contents

1 !2 !3 !4 !5 !6 !7 !8 !

VZS2000

Electrical entry F: Plug-in type Option Port size Nil 01 Without sub-plate Rc 1 8 50 01 F Z VZS2 1 2 Plug-in 5 G 50 VZS2 Non plug-in 2 01 2 Coil rated voltage Symbol Thread type 1 2 3 2 position single 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Option Nil N T F Standard Rc NPT 1 Nil Z None With light/surge voltage suppressor Option NPTF 4 G S With surge voltage

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry F: Plug-in Option Port size Nil 01 Without sub-plate Rc 1 8 02 Rc 1 4 2 50 01 F Z VZS3 1 Plug-in 5 G 50 VZS3 01 Non plug-in 2 Symbol Coil rated voltage Thread type Option 2 position single 1 2 3 4 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 D2 L2 A 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

HRX-OM-W004

Prepare a cable, referring to Fig 3.2-1 or Fig 3.2-2. Terminal resistance 1 1 1 9 5 9 5 9 5 SD SD+ SD SG SD+ SD+ SD+ SG SD SG SD SG Termina resistance l 120 ? Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3.2-1 RS-485 connector connection Tips 1 master : 1 product, or 1 master: N products.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(Tightening torque of 0.3 to 0.4 Nm) Clamp screw B 2.10-23 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Base Mounted Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M 01 Series 1 VQZ100 Body width10mm Port size {2(A)port} Without sub-plate Rc(PT)1/8 01 CP Configuration (A) 2 N.C. 1 1 (P) 3 (R) Manual override B: Locking style (Slotted) : Non-locking push style (Flush) Body

SYJA3000

(Bleed hole) With filter (80 Mesh) 5-Rc(PT)1/8 40 25.5 (Piping port) 20 11.5 12 R1 R2 P 1.6 18 22 22 (R1, R2 port) 2-Rc(PT)1/4 63 1.8 (Bleed port) With filter (80 Mesh) 227.2 3-Rc(PT)1/8, 1/4 (P, A, B port) 3 position closed center/exhaust center/pressure center: SYJA7 20-01 3 position closed center/exhaust center/pressure center: SYJA7 400 0 1 2 3 4 5 3 4 5 3.2 234 8.5 4.3 2(Mounting holes

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/

Modular Type Filter Regulator Series AW

Note 1) Bracket assembly Set nut AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 5) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 5) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 5) Round Square embedded type Round Square embedded type 1.0MPa Note

VZA2000

VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-02 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position M5 x 0.8 Body side 1/8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 0.56 0.23 2.4

REGULATOR

Z Imperial unit Name plate psi Pressure gauge MPa / psi G36-P10-N01-X30 NPT Imperial unit Name plate psi Pressure gauge MPa / psi 0.2MPa setting G36-P4-N01-X30 1Z G G36-10-01 G36-4-01 1 0.2MPa setting Rc G36-10-01-L Round type pressure gauge (with colour zone) G36-4-01-L 1 0.2MPa setting NPT G36-10-N01-L G36-4-N01-L 1 0.2MPa setting G G36-10-01-L G36-4-01-L 1 0.2MPa setting

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10