20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR
20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR
1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.
1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.
to left Option Body size Port size Symbol Nil Description Applicable model 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 B 8 3 With bracket ALF400 to 600 1 1 2 2 1 Metal case with a level gauge X208 ALF400 to 900 2 1 4 3 1 1 1 2 4 1 Line pressure (MPa) 2 1 Note 1) Tank pressure is removed when line pressure is stopped.
/N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.
1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.
0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)
Port size Port size Applicable model Flow rate (l/min) Symbol Lead wire (Refer to page 35.) 100 200 500 50 10 01 02 03 04 Nil N M12 3 m lead wire with connector Without lead wire 1/8 1/4 3/8 1/2 PF2A510/550 PF2A511/521 PF2A551 Output specification Symbol Nil 1 2 Applicable display unit (monitor) model Specification Series PF2A300 Series PF2A200/300 Series PF2A300 Output for display
Example: SS5YJ7-20-03 1 pc. (Manifold base) SYJ7120-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Input block type (Fill out for I/O unit only) Ports 2, 4 size (metric) Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) Ports 2, 4 Symbol C8 C10 C12 02 03 B CM 1 2 3 Ports 1, 3, 5 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 1/4 3/8 Bottom ported Rc 1/4 Mixed Input block (Fill out for I/O unit only) 1: 1/2 3, 5: 3/4 Nil Without SI unit/input block
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1998 D-SMC.L.A. P-86.5 (JT)
. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!
Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight
8 1/4 3/8 1/2 01 02 03 04 PFA710, 750 NPN open collector 1 output + Analog output (1 to 5V) 28 PFA711, 721 PFA751 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 PNP open collector 2 outputs 67 PNP open collector 1 output + Analog output (1 to 5V) 68 Specifications PFA710 PFA750 PFA711 PFA721 PFA751 Model Measured fluid Detection type Dry air, N Heater type 10 to 100l/min 1 to 10l/min 5
ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer
center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.
along with the manifold base model no. 5(R) 1 (P) (R)3 3(R) 1 (P) 3 position exhaust center 3 position exhaust center 4(A) (B)2 4(A) (B)2 (Example) SS5YJA3-41-03-M5 1 pc.
VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177