REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

ZP3

3 Pad diameter Buffer specifications 78.5 3 6 10 15 20 46 6 6 109.5 Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating 56 10 10 1.5, 2, 3.5 114.5 59 15 15 4, 6, 8 10, 13, 16 66.5 20 20 124.5 25 25 Wide selection of piping For 2 piping!

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

ARM10/11

Accessory 6.

ARM10/11

Accessory 6.

HRX-OM-Y098

6.

SMC

6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 134 MXS Air slide table 1322Dimensions: MXS6 13221322Axial piping type (6): MXS6-P Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

CG5-S

18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 124 25 to 300 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 129 32 to 300 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 131 40 to 500 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 149 50 to 600 109 35 32 27 75 32 20 58 9 9 21 14 58

CL

6 !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Back page 6

KJ

F (inch) Model N L1 L2 H (Width across flats) Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 65 5 32 1 4 29 18 29.5 19.5 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 72 KM12-07-35-10 KM12-07-35-6 48 82 31.25 10 19.5 31.5 21.5 13.2 13 17 7 17.46 1 4 1 4 73.5 92 KM12-09-36-10 KM12-09-36-6 52.8 97 37.5 12.7 23.7 37.7 25 15.2 15 18.5 9.5 22.22 5

HRX-OM-W060

6.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

6 10 6 6 15 10 8.5 8.5 17 17 17 17 15 45.5 45.5 4-Rc(PT)1/8 (Piping port) 24 24 32 4-Rc(PT)1/8 (Piping port) 32 [ ] for AC Other dimensions are the same as the grommet style

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CRB2/CRBU2/CRB1

X D1 Y-1 2 to 8 3 C1 L1= 10 15 X-3 4 to 14 3 3 to 9 Y-1.5 3 to 4 C2 Y = L2 = 15 20 5 to 18 X-4 3 to 4 3 to 10 Y-1.5 3 to 5 X = D2 = 20 30 6 to 20 X-4.5 3 to 5 3 to 13 3 to 6 Y-2 C2 = C 30 40 6 to 22 3 to 6 X-5 6 to 15 3 to 8 Y-4.5 Symbol: A7 Symbol: A8 The long shaft can be further shortened by machining it into a stepped round shaft with male threads.

VZ100/300/500

to page 4-6-46.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

6 Component Parts Component Parts No.

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.