Series AP3500

(P.124) 102 Series AP4500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Free flow Controlled flow Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Model Port size Weight (g) AS420-02 2,500 1/4 38 3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: B (Out 1: PNP; Out 2: PNP), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: Unit Selection Function, Option 2: R (w/Bracket)

Single acting, spring return, pin cylinder, Compact design-minimizes mounting space, Three bore sizes available, Strokes from 5mm to 15mm available, Two mounting styles available, Pin Cylinder, Double Acting, Sgl Rod, ROUND BODY CYLINDER, 102 lb

Single acting, spring return, pin cylinder, Compact design-minimizes mounting space, Three bore sizes available, Strokes from 5mm to 15mm available, Two mounting styles available, Pin Cylinder, Double Acting, Sgl Rod, ROUND BODY CYLINDER, 102 lb

Bar stock type valve manifold for VQZ200/300 series valves, Optional DIN rail mount, Side porting, Maximum 20 stations available as standard, 12 port sizes available, VQZ100 Base Mounted Manifold, 3 PORT SOLENOID VALVE, 102 lb

Single acting, spring return, pin cylinder, Compact design-minimizes mounting space, Three bore sizes available, Strokes from 5mm to 15mm available, Two mounting styles available, Pin Cylinder, Double Acting, Sgl Rod, ROUND BODY CYLINDER, 102 lb

Bar stock type valve manifold for VQZ200/300 series valves, Optional DIN rail mount, Side porting, Maximum 20 stations available as standard, 12 port sizes available, VQZ100 Base Mounted Manifold, 3 PORT SOLENOID VALVE, 102 lb

I/O Configurator (NFC version)

Preparation 78 6.4. (1) Input and output size of the wireless slave 82 6.5. (2) Set the number of occupied I/O points for the module and each parameter of the "wireless master" 92 6.6. (3) Set the "wireless master" system 96 6.7. (7) Ethernet setting for the wireless master 99 6.8. (4) Registration of wireless slave to the wireless master (pairing) 102 6.9.

I/O Configurator (NFC version)

Set the number of occupied I/O points for the module and each parameter of the (2) "wireless master" 92 6.6. (3) Set the "wireless master" system 96 6.7. (7) Ethernet setting for the wireless master 99 6.8. (4) Registration of wireless slave to the wireless master (pairing) 102 6.9. Download the EDS file 114 7. Wireless system parameter list 116 8. Error Codes 118 9.

I/O Configurator (NFC version)

Preparation 78 6.4. (1) Input and output size of the wireless slave 82 6.5. (2) Set the number of occupied I/O points for the module and each parameter of the "wireless master" 92 6.6. (3) Set the "wireless master" system 96 6.7. (7) Ethernet setting for the wireless master 99 6.8. (4) Registration of wireless slave to the wireless master (pairing) 102 6.9.

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, 5 PORT SOLENOID VALVE, 4/5 PORT SOLENOID VALVE, 102 lb

XL-OMV0002

A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102

PSxx-OMG0005CN

.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA] [V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

CEx-OMQ0011

25mm 32 32mm 40 40mm 2 s 1 n n () S () 2 s 1 B () L L (mm) (mm) 25 32 40 12000(1mm) 25 MY-A25L 25 MY-S25A MY-S25B 32 MY-A32L 32 MY-S25A MY-S25B 40 MY-A40L 40 MY-S32A MY-S32B 6-2 CEU2 NPN P PNP 24 6-3 CE1-R 05 5m 10 10m 15 15m 20 20m C A B CD E F G () 25 7-1 AA BB CC DD EE HA KA KB KK 9 45.5 5.5 M5x0.8 9.5 69 30.5 16 M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102

LEF-OM002xx

Impact/Vibration resistanc [m/s2] note4) Actuation type Ball screw(LEFS)Ball screw+BeltLEFSL/R Guide type Linear Guide 5 to 40 Operating temperature range [] Operating humidity range [%RH] 90 or less(No condensation) 28 42 Motor size 30 36 Motor output [W] Electric specifications Servo motor(24VDC) Motor type Incremental A/B (800 pulse/rotation)/Z phase Encoder 24VDC10% Rated voltage [V] 102

LEF-OM006xx

W(kg) 40 40 30 30 20 20 10 20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 (W) 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 63 102

LECA6_C

No L A1 B1 7 A2 1 B2 1 1.5m B3 8 A3 A4 2 3 3m B4 B5 9 A5 5 5m A6 3 B6 B7 10 A7 A8 4 B8 B9 11 A9 A10 5 B10 B11 12 A11 A12 6 B12 B13 13 A13 7 PLC A1 B1 A1 (22.4) A13 B1 (8.9) B13 B13 A13 14.4 26 AWG AWG28 11.4 CD-ROM USB USB1.1USB2.0WindowsXP Windows7 PC/AT Windows WindowsXP Windows7 http://www.smcworld.com/ 46 - 11.5 T1 J G S J G E No 102 34.5 4 LCD 185 () 3m 25 22.5 CN4

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A Thd B Thd C Dia Part No. 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M6x1 M6x1 M6x1 M6x1 M6x1 M6x1 M6x1 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25