Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Smooth Vent Valve (Supply Line) XVD Series

Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523

VALVE SEAL 2, XLA, R3 MATERIAL, HIGH VACUUM VALVE, L45, 6 lb

Part Number Description: O-RING (XLA-160)   Product Line: V   Product Line Description: VALVE   Family Code: 399   Family Description: OTHER MISCELLANEOUS SERIES   Class Code: 21   Part Code: 2   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: VALVE SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   Click here to report information errorImage shown may not match exact part number

Table of Contents

mounting screw 2 2 2 2 2 Block mounting screw Chrome steel/Nickel plated 2 2 2 2 Chrome steel/Nickel plated Screw for mounting rail 2 2 2 2 2 Chrome steel/Nickel plated Switch mounting screw 2 2 2 2 2 Carbon steel/Nickel plated Hexagon nut 2 2 2 Hexagon socket head plug Chrome steel/Nickel plated Note 1) mark indicates strokes.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x 1.25 x 23l 76 18 2-M6 x 1.0

PVC Quick Drain Valve

hydroxide Temperature 40C or less Isobutyl alcohol Note 1), 2) Temperature 40C or less Isopropyl alcohol Temperature 40C or less Note 1), 2) Hydrochloric acid Concentration 30% or less Note 2) Hydrogen peroxide Concentration 5% or less, Temperature 50C or less Nitric acid (except fuming nitric acid) Concentration 10% or less, Temperature 40C or less Note 2) Deionized water Sodium hydroxide

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

CNA

2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different sides, Same side), 1 15 80 85 90 95 105 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2

CNA

(n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different

Model Selection 1

Manifold 1/8, 1/4, (3/8) 2, 3, 4.5, 6 17-2-74 VDW200/300 C.O. 3 port Single unit M5, 1/8, 1/4 0 to 0.9 1, 1.6, 2, 3, 4 Pilot operated Diaphragm operation 1/4 to 1 32A, 40A, 50A 10, 15, 20, 25, 35 40, 50 17-3-33 VXD21/22/23 N.C./N.O. Single unit 0.02 to 1 Pilot operated Disk operation 1/4 to 2 32A, 40A, 50A 10, 15, 20, 25, 35 40, 50 VXP21/22/23 17-3-43 N.C./N.O.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

VXR21/22/23

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

Solenoid: No.3 Solenoid, Body Size: 8 (40A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 14 [1 1/2 (40A)], Thread: Rc, Voltage: 2 (200VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: S (Surge Suppressor)

Solenoid: No.3 Solenoid, Body Size: 8 (40A), Style: 2 (Energized Closed/N.O.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 14 [1 1/2 (40A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: C (Conduit)

Solenoid: No.3 Solenoid, Body Size: 8 (40A), Style: 2 (Energized Closed/N.O.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 14 [1 1/2 (40A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Solenoid: No.3 Solenoid, Body Size: 8 (40A), Style: 2 (Energized Closed/N.O.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 14 [1 1/2 (40A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: L (Light)