SMC Corporation of America
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Thermometer Air outlet Air inlet Outside tube Pressure drop (MPa) Cooling water outlet Cover Cooling water inlet Drain separator (Housing) Water chamber cover Stop valve Flower fin tube assembly Drain Air flow rate (m3/min (ANR)) (Example) To get pressure drop at 0.3 MPa of air pressure, 5 m3 /min (ANR) of air flow and model HAW75-20, use 0.0065 MPa at 0.7 MPa from the table and convert P1

As a guide, when W + P0a > P0A, adjust P1, so that it could be W + P1a = P0A. (1) The speed is controlled with meter-out control. When the meterin controller is used in conjunction with the meter-out controller, lurching is reduced. () (2) Installing a regulator with check valve at position (b) can decrease lurching during descent, and actuation delay during ascent.

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

fitting dimension Y W Plate thickness ARP20(K), ARP30(K) : Max. 3.5 ARP40(K) : Max. 5 OUT IN 1021 1021 Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping H Center of piping Center of piping Standard specifications Model P1

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

: Inlet pressure P1: Inlet pressure 15-16-10 11 Air Saving Valve Pressure Valve/Flow Valve Series ASR/ASQ Dimensions Pressure Valve: Series ASR Variable set pressure type Fixed set pressure type (-F20) L1 L1 L2 d L2 d M M D1 D1 D2 D2 L6 L6 L3 L4 AS H H ASP (Width across flats) (Width across flats) ASN D3 D3 AQ A1 A1 ASV L5 L5 A2 A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1

AWM AWD EX: How to obtain the mist generating pressure differential if the flow rate obtained in q above is 35m3/min and the line pressure (primary pressure P1) is 0.7MPa : Extend horizontally from the point at which the flow rate is 35m3/min to obtain the point that intersects with P1 = 0.7MPa.

= 0.7 MPa, P2 = 0.5 MPa Effective area at supply side (mm2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Note 3) 5.1 1.9 PA 5.8 2.1 PB Note 3) 12.6 4.5 AEA 12.6 4.5 BEB 1-5-80

The inlet pressure obtained in the flow characteristic graph of silencer indicates the pressure (P1) prior to silencer. (Refer to the diagram below.)

Inlet pressure (IN) Pressure in diaphragm chamber When the inlet pressure (P1) is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1). When the inlet pressure (P1) is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released into the inlet side (Figure 2).

When the inlet pressure (P1) is shut off and released, the check valve w, opens and the pressure in the diaphragm chamber q is released into the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q, and the force generated by pressure regulator spring e lifts the diaphragm.

(the condition of P1 and Q1) 3. If the suction port is opened completely, the suction flow rate increases to the maximum (Qmax), while the vacuum pressure then drops almost to "0" (atmospheric pressure).

pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view without foot SUP (P1

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 20 For Air Digital Flow Switch Series PFA How to order PFW3 0 0 A Remote Type Display Unit Unit specification Flow rate range Nil M With unit switching function Fixed SI unit Note) 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 1 0

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).