Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 9 235.5 225 208 14 L1 L2 L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

MTS

0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

Speed Controller with One-touch Fitting

Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

VS 8-2/VS 8-4

light 13 Manual override 173 (Double dual 3-port) 139.5 (Single) 188.5 (3-position) 157.5 14 14 14 14 131 8 115 26.5 80 12 12 12 12 4 x M5 mounting holes Formula: L1 = 27n + 85, L2 = 27n + 190.5 n: Stations (Maximum 20 stations) Dimension (mm) 7 L n 9 328 433.5 112 217.5 1 166 271.5 301 406.5 8 274 379.5 10 355 460.5 11 382 487.5 12 409 514.5 13 436 541.5 14 463 568.5 15 490 595.5 16 517

VQC

6 4 Shield ground SHIELD 9 Optical fiber (reserve) RTS 12 Pin no. 3, 5, 7, 8, 10 and 11 marked with "" are open.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32

JIS Standard Hydraulic Cylinder

9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

Swivels

Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33

44

14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9

Process Valve Series VNA

The valve element of the C.O. type, which has no return spring, is in an arbitrary position when air is exhausted through the ports 12(P1) and 10(P2). When pressurized air enters the port 12(P1) (exhaust from the port 10(P2)), the valve element opens, and it closes when pressurized air enters the port 10(P2) (exhaust from the port 12(P1)). Component Parts No.

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

A

NAM250-N03D 38 172 76 10 NAM350-N04D 12 204 90 10 S Y M B O L S NAM450-N06D 34 225 106 10 NAM550-N10D 1" 259 122 10 NAM650-N14D 112" 361 160 10 NAM850-N14D 2" 473 220 10 Manual and Autodrain types are same overall dimensions.