Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

5 Port Solenoid Valve, Series VQC

A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

5 Port Air Operated Valve SYA3000/5000/7000 Series

SYA714002 03 57 77.5 42 10.4 61 M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 69 6.4 2 x 4.3 (For mounting) 87.5 1.8 (Ventilation hole) 26.5 13.5 20.5 20.5 3/8, 1/4 (P , EA, EB port) 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 42 61 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 15.1 69 2 x 4.3 (For mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CG1N20-PS CG1N25-PS CG1N32-PS CG1N40-PS CG1N50-PS CG1N63-PS CG1N80-PS CG1N100-PS Contents C85 Rod cover Tube cover Piston Piston rod Bushing Bumper A Bumper B Snap ring Wear ring Rod end nut Piston gasket Cushion ring A Cushion ring B Seal retainer Cushion valve Valve retainer Lock nut Cushion seal A Cushion seal B Cushion ring gasket A Cushion ring gasket B Head cover Cylinder tube Rod seal

0.

Port size [2(A) port] C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) Body type Manual override Nil B Non-locking push type Locking type (Tool required) Function Note) For inch size one-touch fittings, refer to page 15.

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

SYA3000/5000/7000

) Manual override (Non-locking) 1.3 (Ventilation hole) M5 x 0.8 (P , EA, EB port) 2 x 1.5 die-cast hole (For manifold gasket positioning) SYA3120-M5 M5 x 0.8 (A, B port) 1732 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported 2 position double SYA3220(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward

Sine Rodless Cylinder Series REA/REB

Stop 936 Sine Robless Cylinder Basic Type Series REA Dimensions REA25/32/40 NN G 4 x MM Effective thread depth J L B H G Effective thread length NT 2 x P X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke B D F G H I K L MM x J N NT NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 11.5 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Sensors 3 position exhaust center D: Push-turn locking slotted type J: With switch 2(B) (A)4 4 M5: M5 x 0.8 (EA)5 1 (P) 3(EB) 3 position pressure center A 4 2(B) (A)4 5 2 B (EA)5 1 (P) 3(EB) For switch operation, refer to page 412.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter A1 Bracket A e Unit specification r Piping specification Symbol Description Nil Units selection function*2 M SI unit only*3 P Units selection function (Initial value psi)*3 Symbol Description 02 R1/4 (M5 female threaded) N02 NPT1/4 (M5 female threaded) F02 G1/4 (M5 female threaded) C01 Rc1/8 A2 URJ1/4 (Face seal fitting) B2 TSJ1/4 (Compression fitting) ZS-46-B Panel mount

42

(Double) 163 (3-position) 58.2 96.2 458 Base Mounted Plug-in Unit VQ4000 Series Bottom ported drawing SV SYJ M5 x 0.8 Ground screw 1/8" External pilot port SZ 10.7 47 106 VF 1/4" 4(A), 2(B) port 9 71.7 Connector location on U side (FU) 9 U side VP4 27 n VQ 1/2 X 12 X B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 VQ 4/5 VQ 4/5 8 A A A A A A A A B B B B B B B B VQC 1/2 7 SMC SMC SMC SMC SMC SMC SMC 6 VQC

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

VZ100/300/500

M5 x 0.8 b Cv b Cv VV3Z1-01-1 VV4Z1-20-1 1/8 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/-6 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 Width across flats 7 Model A B C D E F G H I M M 12 13.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 5.5 6 15 16 7 8 5 6 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Weight: 3.5 g Weight: 4.2 g Universal Elbow: M-5UL Universal Tee: M-5UT Width across flats 7 2 x M5 x 0.8 Width across flats 7 M5

0.55

) 25.6 30.7 76.8 For vacuum/VPA542V-1l (-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 28 Series VPA300

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.