x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.
Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.
M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed
T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.
Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.
Caution Operation instructions Consult P/A when using solvents other than water.
input No., State (P-No.) label C-AND OR input time out subroutine call command General-purpose input No., State (P-No.) label C-OR AND input condition jump command General-purpose input No., State (P-No.) label J-AND Condition jump OR input condition jump command General-purpose input No., State (P-No.) label J-OR Program Control Commands Parameter value Mnemonic Classification Function
T I O N O V E R S I Z E D R O D XB5 O P T I O N Inches Example: 04 = 4 Stroke When ordering an oversized rod, please order the following way to represent the rod size required.
Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x
Example) Bolt M5 x 50l 4 pcs.
1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) 10 - Step motor (servo 24VDC) Ball screw drive LEFS40 Model 150 to 1200 Stroke
+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115
SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7
ported Body ported Base mounted Base mounted (With sub-plate) VZA212-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.C.
Seal 0 1 Metal seal Rubber seal 12 SI unit Serial Unit (SI Unit) Dimensions/EX250 DeviceNet PROFIBUS-DP CC-Link SI SI SI PW PW(V) RUN PWR(V) MOD/NET PWR(V) PWR STATION NO.
Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.