Aluminum High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

[95.1] (Lead wire length) (Non-locking) Manual override 41.5 [48] 29.1 33.5 22.5 R2 R1 P 13 5 10 10 14 5-M5 0.8 (Piping port) 28 [ ] for AC 3 4 5 3 4 5 L type plug connector (L) : SYJ3 40L -M5 M type plug connector (M) : SYJ3 40M -M5 33.5 16.5 33.5 16.5 23.2 (Mounting holes) 23.2 (Mounting holes) 22 3 22 3 2.5 2.5 A B A B 11 11 17.5 17.5 A B A B 47.4 50.7 33.7 About 300 111.6 39.2 [40.5]

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

One-touch Fittings

L D Q L M *1: D is maximum diameter.

MGP

M L MGP 25, 50, 75, 100 16 MXS 20 25 32 40 50 63 MXQ MGP 25, 50, 75, 100, 125, 150, 175, 200 M L MXF MXW 80 100 M L MGP 50, 75, 100, 125, 150, 175, 200 MXP OUT(N) IN(N) Theoretical Force MG (N) Rod dia.

Electric Actuator with Integrated Guide

L3 m Mey a 30 20 10 0 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment L : Overhang to work piece center of gravity (mm) Refer to page 71 for deflection data. 2 6 Standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF Scale: 18% thread depth 8 4-M5 x 0.8 89.5 50 30 (2 x n1)-5.5, Drill through 11.5, counter

3 Port Solenoid Valve Metal Seal Series VZ200 1

: VZ4 5-D(Z)L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

CY1

Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 Screw size M6 x 1.0 M4 x 0.7 M5 x 0.8 M8 x 1.25 Bolt dimensions Dimension t l-9 l-7 l-8 l-8 l-12 Nm 4.4 1.37 2.65 13.2 Fastening torque {kgfm} 0.45 0.14 0.27 1.35 Square nut l t 4.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

W H T U Pin no. n LEC-CSNA-1 39 37.2 12.7 14 14 773 LECY M U Series Options cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L* 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable * Not available for the MECHATROLINK2cable. * LEC-CYM-l is JEPMC-W6002-ll-E manufactured by YASKAWA CONTROLS CO., LTD. * LEC-CYU-l is JEPMC-W6012-ll-E manufactured

CQS

F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire 24 V Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced