Air Cylinder Series MB

D-X Individual -X Technical data 335 Series MB1 Standard Type Basic style: (B) Cushion valve W V Port 2 x P MM G G With rod boot E e E D d H1 MB Effective thread 10.2 16 2 x 4 x J 10.2 f l S + Stroke H A K F N N C h B ZZ + Stroke Without Air Cushion Bore size (mm) Bore size (mm) S ZZ S ZZ 32 40 50 63 80 100 125 90 90 102 141 145 164 102 124 124 132 164 200 200 235 In the case of w/o air

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

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1 Drain q r e w t i u y o !0 !

Electric Slide Tables

3 3 2 Lead 16: LES25J 2 1.5 2 2 1 1 1 1 0.5 0 100 200 300 400 500 0 0 0 50 100 150 200 250 300 350 400 450 0 0 0 100 200 300 400 500 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] Speed [mm/s] 2 Series LES Cycle Time (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60 0.40 400 mm/s 0.20 30 40 50 60 70 80 90 100 110 120 130 140 150 Stroke

ZP3

w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Integrated Controller

[kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55 50 45 40 35 30 25 20 15 10 5 0 15 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 3000 mm/s2 5 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

S With surge voltage suppressor VQ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light.

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Fixed 4% F .S.

Vacuum System Peripherals:

Light/Surge voltage suppressor DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Pilot valve specifications Nil Nil Individual specifications Common specifications Z With surge voltage suppressor S Y With light/surge voltage suppressor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

1

16 152 37.5 21 MB Series CM2 Stroke A Stroke B S + Stroke (A + B) MB1 ZZ + Stroke (A + B) SB + Stroke B SA + Stroke A ZZ + Stroke (A + B) CA2 WC CS1 GC GD WD ZZ SB SA GD GC Bore size (mm) ZZ S GC Bore size (mm) 20 207 78 47 24 7 40 269 167 29 W W D port C Port B port D port C Port A port C76 25 215 78 47 24 7 Needle position for D port Needle position for C port 50 295 179 33 32 219 80

Air Cylinder

S 1 pc. n n pcs. CG3 Mounting Rod end bracket N Rubber bumper JMB Nil None V Single knuckle joint W Double knuckle joint Note) Air cushion type CG1KRA is a Made-to-Order product.

CL

Basic Foot Front flange W/o rod boot W/ rod boot S W/o rod boot W/ rod boot W/o rod boot W/ rod boot S Stroke range LS Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 WB S Bore (mm) Bore (mm) Bore (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 GB GB TB GB ZZ 206 223 226 250 ZZ ZZ 210 ZZ ZZ 206 223 226 250 ZZ 20 25 32 40 20 25 32 40 20 25 32 40 186 201 204 230 190 201

NCA1

A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT RANGE (MA

CQ2

T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

PFxx-OMX0002

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

Air Cylinder

ZZ S ZZ S ZZ S ZZ S ZZ 20 87 141 112 166 137 191 25 87 145 112 170 137 195 32 89 147 114 172 139 197 164 222 40 113 179 138 204 163 229 188 254 213 279 Symbol Symbol Bore size Bore size Female Rod End (mm) Stroke A1 H MM 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6

Aluminum High Vacuum Angle Valve

steel 304) Body y (Material: A6063) w Valve seal (Maintenance part) r S Valve seat assembly (Maintenance parts) S Valve i (Material: Stainless steel 304) (Material: Stainless steel 304 + Sealant) Plate Valve side exhaust Port 3(R) (Exhaust port) Refer to the back of page 465 for Maintenance Parts.