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Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: Panel Mount + Front Protection Cover, Option 3: -, X Options: -

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Current Output, Auto-Shift, Option 1: Initial Value PSI, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 1 Output, Option 1: W/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

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x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

S E C T I O N T H R O U G H A R M ACCESSORIES O P T I O N P A R T N O/A R M Bore size (mm) Part No.

Connection thread Face seal M R G Uni UNF NPT M R Uni P.319 P.319 P.391 Metric size P.383 New New P.419 P.351 P.351 P.403 Inch size P.375 P.413 P.375 P.427 Series KQ2 INDEX 316 Series KQ2 Selectable seal method Face seal adopted for threading Connection thread: R, NPT Improved installability (Reduced tool-tightening after hand-tightening) Face seal Face seal Sealant 1/6 of a rotation or

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

R G E V O LTA G E S U P P R E S S O R With E W/O Light / With Surge Voltage Suppressor H O W T O O R D E R S U B P L A T E S E R I E S V Q 4 0 0 0 VQ4000 P Plug In Conduit Terminal E L E C T R I C A L E N T R Y E N C L O S U R E Dust Proof W Dust Tight Jet Proof P I P I N G Side Piping B Bottom Piping P O R T S I Z E 02 1/4 03 3/8 T H R E A D T Y P E Rc N NPT T NPTF F G Courtesy of Steven

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications

n o t o P e r a t e p r o p e r l y , e x a m i n e a n d r e p a i r t n e m ' ( R e f e r t o P . 5 ' ) a c h e c k d r a i n P i P i n s o f m i s t e a c h s e p a r a t o r s . l f t h e v r i s e o r b e n d ' r e m o v e r i s i n g p a r t s a n d s t r a i g n t e n d r a i n p i p l n s . a l f e t e m e n t s o f e a c h s e p a r a t o r s a r e n o t r e o l a c e d p r o p e

R 30 (Rotating angle) 40, 50 Construction p. 120 Buffer Assembly p. 130 66 A Basic Pad Bellows Type ZP Series How to Order Dimensions/ Models Construction Mounting Bracket Assembly ZP 06 B N p. 68 p. 115 p. 117 From p. 121 Pad unit ZP T 06 B N A5 From p. 69 p. 115 p. 117 From p. 121 With adapter ZP T 06 B N J 6 B3 A8 From p. 79 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Bellows

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

08 Dual flow fitting SSQ1000-52AP. 39 P. 41 P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P.

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 40.1 39.3 18.8 18 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] 2-One-touch fitting One-touch fitting 2n1-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 [PE: