ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

AC

The pressure at the bottom of piston w decreases, causing the pressure in upper chamber t to become greater than the pressure in lower chamber y. So, piston w descends, causing the hole of valve r to be closed by valve seal e.

Battery-less

5 r t w q y !6 !

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Table of Contents

1 Drain q r e w t i u y o !0 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Modular F.R.L. Units

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

%silltr

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

Made to Order

(for std model) w-1 From P. 1188 w-1 From P. 1208 MY1B-Z Linear guide type MY1H-Z Basic type MY1B With cover (W) is also available. MY1M (W) Slide bearing type w-1 From P. 1238 With cover (W) is also available.

SMC Basic Pneumatics

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

Table of Contents

No. q w e r t y u i o !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

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l Y w H w Y w l l " i I I I r r l i | v l l . s o w d ; l w | v w f f Y L : f <.t __ I i i Y f Fw -t wl5uwl sor-;sS sownsot Y r.L. rr 5 r r a r s o s o w l s o w f s o v l , * ; * 1 i ' l , l -1 l a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a MX9IEtr-@EHN+NE_I T l I r I I I I l I o , o o @ o a @ @ @ esrio" ruup @Auto switch See

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

Fluoropolymer Piping Equipment

Dimensions Tubing extension straight connector: LQ3H-T Metric Size H W Model Applicable tubing O.D.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B