Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT, G1/4 Rc, NPT, G3/8 6.0 150 62 47 9.0 10 30 138 6.0 47.5 40 64 65 24.0 10 32.0 8.5 240 92 66

MTS

) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

10-cls-e

Contents Bore size (mm) CS1N125A-PS CS1N140A-PS CS1N160A-PS 125 140 160 180 200 250 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS ^0 61 ^2 ^3 ^4 ^5 66 ^7 68 Wiper ring Cushion seal Set of left nos. ^0, ^2, ^3, ^4, ^5, ^7 Rod seal CS1N200A-PS CS1N180A-PS 61, 66 and 68 are non-replaceable parts, so they are not included in the seal kit.

Compact

Size 25 Symmetric/Top mounting LEMHT25LT-Stroke + 160 A-A T-slot for mounting 10 Stroke + 140 Stroke adjuster 17 17 4 x 5.5 Slot for auto switch 69 10.2 66 10 A Counterbore diameter 9.5, depth 5.4 B 44 Workpiece mounting center line Stroke adjuster A 3 3 Origin When LECP1, LECP6 or LECPMJ is used.

Compact Cylinder

With Magnet for Auto Switch 100 426 446 467 488 509 530 551 572 592 100.0 Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66

48

2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66

Compact Guide Cylinder

2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66

44

33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference dimensions after installation of R thread

15

Dimensions: Belt Drive LEFB40U/Motor bottom mounting type 6H9 ( ) depth 7 +0.030 0 (170) 106 LEF 4 x M8 x 1.25 thread depth 13 Body mounting reference plane Note) 60 58 LEJ LEL M4 x 0.7 thread depth 8 (F.G. terminal) LEM 7 8 74 6H9 ( ) depth 7 7 +0.030 0 LEY A (Table traveling distance) 66 (86) L Belt tension adjustment bolt (M5: Width across flats 8) LES 86 97.5 6 61 (12) LEPY LEPS LER (

Fieldbus System

center (A) 4 (B) 2 4 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 5 3 (R2) 1 (P) 5 (R1) 38 Series VQC1000 Dimensions (mm) Power supply with M12 connector (5.25) L1 L2 (Rail mounting hole pitch: 12.5) L4 5.5 L7 28 L6 8 26 47 Communication connector 1.5 P = 10.5 1.5 Indicator light 85 (12) Marker groove Manual override Power connector B A B A B A B A B A A A 93.5 106 8 90 71 66

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design 66

Series 10-, 21- AF-A Air Filter

66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Series 10-, 21- AW-B Filter Regulator

specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Station L1 L2 Port size One-touch fitting 625 3 Port Pilot Solenoid Valve 10-SYJ500 Type 41 Manifold: Side Ported/10-SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5

EXxx-OMW0014CN

(PQI) 61 9.8. 62 9.9. 66 9.10.LED 67 9.11. 68 10.

EXxx-OMU0020CN

(M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

LV50-OMQ0002

Value Hold 47 F32 Flow direction setting 48 F33 Close proximity setting 50 F34 Zero-reset setting 51 F80 Setting of Power Saving Mode 52 F81 Setting of Security Code 53 F82 Input of Line Names 54 F90 Settings of All Functions 55 F98 Check of Output 56 F99 Reset to the Default Setting 57 Other Settings 58 Maintenance and Inspection 60 Troubleshooting 61 Specifications 64 Applicable Fluids 66