Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1 A B A B A B 12 4.5 5.5 5 6 2 3 16 7.5 5 8 5.5 5 2.5 20 7.5 6.5 8 7 5 4 25 7.5 7 8 7.5 5 4.5 32 9.0 6 9.5 6.5 6.5 3.5 8 5 12 9 11 8 40 13 8.5 9 13.5 4.5 9 10.5 6 12 7.5 16 11.5 15 10.5 50 11 11.5 7 11.5 7.5 12 8.5 9 10 10.5 14 14.5 13 13.5 63 13.5 14.5 9.5 14 10.5 15 11 12 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 13.5 18 14 18.5 15 15.5 16.5 17 20.5 21 19.5 20 100 21 24 17 21.5
Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
B + A B A B A 42 18.4 2-4.2 Manual override (Press and turn for the locking type.) 2-One-touch fittings (Mounting hole for manifold) 71.9 2-4.2 42 18.4 (Light/Surge voltage suppressor) Applicable tubing O.D.: 8 10 (A, B port) (A, B port) 2-One-touch fitting (Mounting hole for manifold) 71.9 (5.5) Applicable tubing O.D.: 8 10 (5.5) 48.6 (Light/Surge voltage suppressor) 33.3 48.6 31.5 B +
Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom
exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0 1 0 1 0 1 0 1 [For Rc 3/4] Rc 1/8 External pilot port 3-2.3 2-7 (Mounting hole) Rc1/8 (PE port) 174.5 [176.5] 31 [41] 100 9 [20] 2 (Lead wire electrical entry) Manual override (Non-locking) A B [13] 11 2 48 60 72 [79] 12 COM A B PE A B X EA EB P [For Rc 3/8, 3/2] Rc 1/8 External pilot port 21 [31] 34 8 161.5 [165.5]
A C B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) P 94.1 (Single) 107.6 (3 position) 9 kit 5.5 67.9 35 J 47.1 34.3 kit 28.1 12.7 T kit 2 x M4 DIN rail clamp screw EXH outlet 49.4 L U side D side Stations n 8 7 6 5 4 3 2 1 kit One-touch fitting 9 60 [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported S kit 4 4 4 4 4 4 4 4 3 R (49.4) 2 P 1 2 2 2 2 2 2
size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55
) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations
Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5-41-2 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 .39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 1/4 1/8 Body ported For internal pilot VZ52 1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot
size 14/2 (PA/B) 4/25/3(A/BR) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Manifold model 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36 0.35 0.35 0.22 0.24 0.29 0.12 0.16 0.21 0.15 0.16 0.18 0.17 0.14 0.75 0.83 0.91 0.64 0.68 0.82 0.8 0.74 0.32 0.27 0.36 0.26 0.23 0.31 0.29 0.32 0.19 0.20 0.24 0.16 0.17 0.21 0.20 0.19 M5
Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.
Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.
Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.
Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.
thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8,
A B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 9 10 16 7.5 5 8 5.5 5 2.5 12 9.5 20 7.5 6.5 8 7 5 4 12 11 25 7.5 7 8 7.5 5 4.5 12 11.5 32 9.0 6 9.5 6.5 6.5 3.5 13.5 10.5 8 5 12 9 11 8 40 13 8.5 13.5 9 10.5 6 17.5 13 12 7.5 16 11.5 15 10.5 50 11 11.5 11.5 12 8.5 9 15.5 16 10 10.5 14 14.5 13 13.5 63 13.5 14.5 14 15 11 12 18 19 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 18 18.5 15 15.5 22 22.5 16.5
A B A B A B A B A A A PWR 93.5 COM (35) 64.4 43.2 66 75 (40) series EX500 2 9 SI unit 4 x M4 mounting hole 8 7 6 5 4 3 2 1 n D side Stations U side C8 [3(R) EXH port] C8: 8 One-touch fitting M12 8-pin socket DIN rail clamp screw R R 0 62.5 3 3 60 1 X X 40.5 B B B B B B B B 12 12 22.2 P P 25 1 1 A A A A A A A A 18.5 7.5 9.5 (12) (7.5) M12 8-pin plug C8 [1(P) SUP port] C8: 8 One-touch fitting
(mm) With rod boot Bore size (mm) Stroke range (mm) l e CD J B BB C F GA GB M NA NB P R S T LH LT LX LW X1 Y1 SS Z f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 21.5 15 25 to 1400 40 M10 x 1.25 52 52 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 12 15 25 to 1400 1/3.5 stroke 50 M10 x 1.25 55 52 76