Prevents Micro-Bubbles

material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking

CDQ2BP series

0.0016 cm2 0.1550 m2 10.765 in2 inz It2 Energy f t . l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Compact Cylinder High Magnetic Field Design CDQ2BP Series

0.0016 cm2 0.1550 m2 10.765 in2 inz It2 Energy f t . l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

7

Lead wire length symbols: 0.5 m Nil (Example) M9NWV 1 m M (Example) M9NWVM 3 m L (Example) M9NWVL 5 m Z (Example) M9NWVZ D-X 427 A CK1 Series Specifications Bore size (mm) 50 40 63 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C Ambient and fluid temperature Piston speed 50

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Model Indication of the Replacement Parts (7) Supply valve, (8) Release valve Rated voltage 5 24 VDC 6 12 VDC Electrical entry Note 1) L L plug connector with lead wire LO L plug connector without lead wire M M plug connector with lead wire Note 2) MO M plug connector without lead wire Note 2) Note 1) All with light and surge suppressor.

LEH_C

-4 M30.5 0.9 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6 LEHZ(J)20(L)K2-10 M50.8 3.0 8 LEHZ(J)25(L)K2-14 M61 5.0 10 LEHZ32K2-22 M61 5.0 10 LEHZ40K2-30 M81.25 12.0 14 17 - LEHF [Nm] LEHZ(J)10(L)K2-4 M30.5 0.9 LEHZ(J)16(L)K2-6 M30.5 0.9 LEHZ(J)20(L)K2-10 M40.7 1.4 LEHZ(J)25(L)K2-14 M50.8 3.0 LEHZ32K2-22 M50.8 3.0 LEHZ40K2-30 M61 5.0 [Nm] L[mm] LEHZ(J)10(L)K2-4 M40.7 1.4 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

DOZ is not available. 2 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector DO:

Process Pump

min 1 to 20 L/min PA(P) Average discharge pressure 0 to 0.4 MPa 0.2 to 0.5 MPa (for 0 to 60C) Pilot air pressure PAX Air consumption 230 L/min (ANR) or less PB Dry Up to 1 m (inside the pump is dry) Suction lift Wet Up to 4 m (with fluid inside the pump) PAF PAF 80 dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20

2/3 Port Valve

(No need to add options "S" and "L".)

VZS2000

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

COQ2BP

NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

Multistage Ejector (N)ZL Series

G H L LN LO M MN MO Lead wire length 0.3m Lead wire length 0.6m Lead wire length 0.3m Without lead wires Without connector Lead wire length 0.3m Without lead wires Without connector Grommet L type plug connector M type plug connector 4 Multistage Ejector Series (N)ZL Ejector Specifications Standard (N)ZL112 Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure

LVQ

Description Body class Symbol LVC LVA Bracket assembly LQ-GBL LVH J, K 1, 2 LVD J type K type LVQ LQ 1, 2, 3, 4, 5, 6 L, M LVN L type M type (for short piping) TI/ TIL Table 1 Tubing size symbols Part No. Description Replacement parts PA Tubing O.D.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

L plug connector: VQD1151l-lL-M5 M plug connector: VQD1151l-lM-M5 5 5 5.5 SY 4(A) 2(B) SYJ SX VK VZ Lead wire length: 300mm Direct manual override Light 27 VF VFR SMC 17.6 11.2 3(R) VP7 9 3 2-3.5 Mounting hole 10.9 9.1 VP4 5.5 VQ VQ4 33.5 38 37 12 28.5 VQZ 1(P) 1(P) VQD 4-M5 X 0.8 5.5 (P, A, B, R port) 13 VZS L plug connector (L) 49 50.5 VFS M plug connector (M) VS VS7 1.13-7 Series VQD1000

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .