MXU

(Refer to the figure below.) 0.061 0.053 0.062 34 20 0.076 0.066 0.074 38.5 25 0.076 0.066 0.074 41 30 0.047 0.041 0.109 28.5 5 0.047 0.041 0.109 31 10 0.080 0.069 0.169 36 15 MXU10 9.5 0.080 0.069 0.169 38.5 20 0.103 0.089 0.212 44 25 0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25

Compact

0.022 16 2 0.038 20 3 0.055 25 5 0.09 Kinetic energy E [J] = 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

3 @2 @0 #3 #4 #5 1212 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 17 18 20 21 22 23 24 26 27 28 29 33 34 38 39 40 41 42 43 Description Material Note Aluminum alloy Aluminum alloy Special resin Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Special resin Stainless steel Sintered iron material

Precision Clean Regulator

Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port size 41

Trimmer Auto Switch

Parallel style MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 Parallel style MHZL2 6.0 7.0 10.0 11.0 Wide type MHL2 7.0 8.0 8.5 10.5 11.0 12.5 Parallel style MHS2 (2 fingers) 6.5 7.0 7.5 8.5 Parallel style MHS3 (3 fingers)/MHS(L)3 6.5 7.0 7.5 8.0 Parallel style MHS4 (4 fingers) 6.5 7.0 7.5 8.5 Angular style MHC2 30 to 10 30 to 10 30 to 10 22.5 to 10 180 Angular style MHW2 88 to 5 54 to 6 58 to 5 41

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets

Series

For manifold type 31, S31, 32, S32 5 port (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 Electrical entry 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC E: Push-turn locking lever type Grommet L plug connector M plug connector M8 connector WO: Without connector cable M: With lead wire (

PSE530

.: 0.8 mm Sensor cable/Option Compliant with CE marking Standards Piping Specifications Model M5 M5 x 0.8 male thread R06 R07 1/4 inch reducer type Port size 6 reducer type Pressure sensor: Silicon, O-ring: NBR Wetted parts material Body: Stainless steel 304 Body: PBT 41 g 38 g With sensor cable (3 m) Without sensor cable Mass 7 g 3.8 g 829

How to Order

Coil type Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate type, type 41, S41, 42, S42 manifold Power saving circuit is not available for W type.

10-SYJ3000

5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn locking slotted type Coil type M5: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41

SYJ300

For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M

The series is available in six size options with a wide range of accessories.2 different body sizes, Variety of different drain options, Aluminum die cast body, MAIN LINE FILTER, AIRLINE EQUIPMENT, AFF MAIN LINE FILTER, GB, AFF 3/4INCH STANDARD (PT), 3.14429 lb, ModelRated flow Note)(l/min (ANR))Port sizeMass (kg)AFF11C22001 2, 3 41 2, 3 41.4

other SMC air preparation equipment.Internal pilot relieving style (pilot air is always bleeding), Port sizes ranging from 1/4 to 2, Optional bracket and pressure gauge, MFLD BLOCK, AIRLINE EQUIPMENT, ARM MANIFOLD REGULATOR, D1, ARM 1/4INCH PART, .66755 lb, ModelPipingPort sizePressure gauge port sizeMass (kg) IN sideOUT sideRegulatorEnd plate BodyEnd plateARM2500Common IN--3/81/41

formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, FLUOROPOLYMER, MFLD BASE, VALVE, FLUOROPOLYMER, 5.43400 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, FLUOROPOLYMER, MFLD BASE, VALVE, FLUOROPOLYMER, 4.98300 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, FLUOROPOLYMER, MFLD BASE, VALVE, FLUOROPOLYMER, 5.50000 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

DIN MOUNTING/ IZT40/41 POWER SUPPLY, IONIZER ACCESSORIES, IZD, IZE, IZH, 865

type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, FLUOROPOLYMER,MFLD BASE RSTRCT, VALVE, FLUOROPOLYMER, 2.56080 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

Regulator manifold, modular type, NPT type threads, Optimal for central pressure control, One-touch lock system, Maximum operating pressure: 1.0MPa, REG, AIR, AIRLINE EQUIPMENT, ARM MANIFOLD REGULATOR, 2D, ARM NO SIZE RASTANDARD (NPT), 4.23060 lb, ModelPortingPort sizeWeight lb (g) INOUTTotal weight (n: stations)Regulator (Except manifold)NARM2000Common IN1/41/8(188 X n) + 43.3 (