RSH/RS1H

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

Soft Start-up Valve AV2000/3000/4000/5000

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

17

Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Soft Start-up Valve AV2000/3000/4000/5000 1

Pressure range 0 1 2 3 4 5 Needle rotations 14-3-6 7 Soft Start-up Valve Series AV2000/3000/4000/5000 Working Principle w F.R.L. e AV r B ON OFF q t AU B-B AF 1(P) 2(A) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u IR y VEX AMR 3(R) B ITV IC Working description

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

ZB-OM00301

M5 Q1 +COM N.C.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

Digital Gap Checker

(B) Within the acceptable range (Seats correctly).

VCA

Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

RSH

MK/MK2 RSQ/RSG RSH A CE1 Auto switch mounting position Auto switch model D-Z7l D-Z80 D-Y59 D-Y7P D-Y69l D-Y7PV D-Y7lW D-Y7BAL D-Y7lWV CE2 ML2B Bore size (mm) A B A B A B A B 20 18 8 18 9.5 18 2 18 4 ML1C 32 13.5 10 13.5 12 13.5 4.5 13.5 6.5 50 21.5 12 21.5 14 21.5 6.5 21.5 8.5 REA 63 16.5 31 16.5 33 16.5 25.5 16.5 27.5 80 26 33 26 35 26 27 26 29 REC RHC How to Install an Auto Switch MTS To

Floating Joint/Stainless Steel Type Series JS

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

ZSE20(F)_ISE20

B Panel mount adapter Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no. Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

ML1

C B A A B A B A B ML1C25 ML1C32 ML1C40 MY-S25 MY-S32 MY-S40 5.5 9.5 5 8 M6 X 1 50 35 117 103 6.6 11 6 11.7 M8 X 1.25 64 45 146 128 9 14 5 14.8 M10 X 1.5 80 55 170 148 4.7-9 Series ML1 Construction Component Parts Component Parts Description Note Material No Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Material No Aluminum alloy Aluminum alloy Aluminum

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

NAMUR

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 400 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

ARJ1020F

Spring 134313 o AWM Dimensions AWD K A Model ARJ1020F-M5-04 ARJ1020F-M5-06 21 22 B 10.4 12.8 C 4 6 D E F 10.6 (Width across flats: 10) G H J Caution 17.2 M5 X 0.8 6 3.5 15.5 50 ITV qRelease the lock to adjust the pressure. After the adjustment, engage the lock. Failure to observe this procedure could damage the handle or cause the secondary pressure to fluctuate.