SMC Corporation of America
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Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: -X167USB (Turk NPN DC), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: -X167USB (Turk NPN DC), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: -X167USB (Turk NPN DC), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A017 (Straight Machined ref NAAMS ACA117M)

L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R

The summary of product parts of the PF3WC/S/R series do not change. Return (Return unit) Supply (Supply unit) Product number Manifold type Qty Stop valve handle Flow adjustment knob PF3WB Integrated type: Basic type 6 Thank you for purchasing an SMC PF3WB/C/S/R Series Digital Flow Switch.

90 ) () <> -5No.PF-OMN0009CN-F * 16 FG (49 N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMN0009CN-F * () 6 33 () () 10 m DC(-)() -7No.PF-OMN0009CN-F * ( ) () CE -8No.PF-OMN0009CN-F * 3 * -9No.PF-OMN0009CN-F * , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.54323 lb

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

to 410 8 to 200 9011000 24 to 500 16 to 340 8 to 170 Max.acceleration/deceleration [mm/s2] 3,000 0.02 Basic type Positioning repeeatability [mm] 0.015Lead H0.02 High precision type 0.1or less Basic type Lost motion[mm] note3) 0.05or less High precision type lead [mm] 10 5 20 12 6 24 16 8 Impact/Vibration resistanc [m/s2] note4) 50 / 20 Actuation type Ball screw(LEFS)Ball screw+BeltLEFSL/R

When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction selection is 0(+: Counter motors side).

Plug-in manifold for VQ1*0* valve, Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING .85034 lb

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.53221 lb

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.94740 lb

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.98416 lb

For details, refer to the IDK series in the Best Pneumatics No.6. 705 MHY2 Series Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120