Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing bearing CX 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300

LEF-OM006xx

LEFB25 2 LE FB16 LEFB16 0 0 500 1000 1500 2000 V (mm/s) -13- 2.3.

REA/REB

50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Symbol Name and function range [unit] PL01 **LIT1 Linear servo motor/DD motor function selection 1 (Do not change this value.) 0301h 0301h PL02 **LIM Linear encoder resolution Numerator (Do not change this value.) 1000 1000 [ m] [ m] PL03 **LID Linear encoder resolution Denominator (Do not change this value.) 1000 1000 [ m] [ m] PL04 *LIT2 Linear servo motor/DD motor function selection 2

REA/REB

750 20 1500 1000 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 2000 1500 32 High Precision Guide Type REAH 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 2000 1500 Note) Intermediate strokes can be arranged in 1mm increments.

REA/REB

50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

10

Note 4) The stroke range with rod boot is up to 1000 mm. Please consult with SMC when exceeding 1000 mm strokes.

AC Servo Motor Driver

Item mm inch degree pulse D * P K D3 D3 Unit setting 0 1 2 3 0.001 0.01 0.001 0.01 0.01 0.0001 0.0001 0.01 Travel per pulse 0.1 to 1 to 10 to 100 to to to to to to to to Unit of travel m/PLS inch/PLS degree/PLS PLS Constant K for conversion into unit of travel 1 to 10 to 100 to 1000 1 to 10 to 100 to 1000 1 to 10 to 100 to 1000 None Reference For 1 m/PLS, set constant

Modular F.R.L. Units

When adding a float switch to the 1000 cm3 tank, select IS400-1 or IS400-2.

4-channel Flow Monitor ( compatible)

The value can be changed between the digits -1000 and 1000. Move on to the setting of rated upper limit of additional range. Press the SET button to set. Setting of rated upper limit of additional range Press the UP or DOWN button to change the value. Press and hold the button to change the value continuously. The value can be changed between the digits -1000 and 1000.

CS1

Stroke (mm) Tube material Aluminum alloy Carbon steel tube Mounting bracket Basic Rear flange Single clevis Double clevis Center trunnion Basic Rear flange Single clevis Double clevis Foot Front flange Foot Front flange Bore 125 1000 or less 1400 or less 1000 or less 1600 or less 140 1000 or less 1400 or less 1000 or less 1600 or less 160 1200 or less 1400 or less 1200 or less 1600 or less

Series VQ Metal Seal/Rubber Seal Body Ported

Manifold optionsSV5Q14OP, #1 to #3 1.10-58 Plug Lead Unit/Flip Style Body Ported VQ 0/1000/2000 Manifold Options Double check block (Separate style): For VQ0/1000 VQ1000-FPG It is used on the way of the secondary side piping to keep the cylinder in the middle position for a long time.

10

4/RJ08 4 4 12 10 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] RJ1007L 3 3 8 RJ0806L RJ0604 2 6 2 4 RJ0806H RJ1007H 1 1 RJ0805 RJ1006 2 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 200 400 600 800 1000 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] Graph !6/RJ14 Graph !8/RJ27 Graph !

C95

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 63 100 80 200 200 50 40 50 50 100 100 Load weight: m (kg) Load weight:

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1000 500 100 10 1 10 100.4 50.4 10.4 1.4 0.5 100 10.4 5.4 1.4 0.5 0.4 Speed (mm/s) 150 7.1 3.8 1.1 0.5 0.4 300 3.8 2.2 0.8 0.5 0.4 Values will vary slightly depending on the operating conditions.

AZ1000

However under Japanese regulation, only MPa is available in Japan. 40 Specifications 1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect.

CV/MVGQ

Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.