MHx-OMZ0004

-5. 1. 2. 3. 4. 5. 1. 20 - 5-6. 1. 1 ()ISO VG32 (MSDS) 6. 1. 2. 3. 4. 5. 6. 21 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 22

MHx-OMZ0005

M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

LEJ-OM004xx

alloy Alumite treatment 4 Table Aluminum alloy Alumite treatment 16 Motor 5 Housing A Aluminum die casting Paint 17 Grommet NBR 6 Housing B Aluminum die casting Paint 18 Dust seal band Stainless steel 7 Seal magnet 19 Bearing 8 Motor cover Aluminum alloy Alumite treatment 20 Bearing 9 End cover Aluminum alloy Alumite treatment 21 Nut fixed pin Carbon steel 10 Roller shaft Stainless steel 22

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Carbon steel Electroless nickel pated 12 Connect shaft Carbon steel Electroless nickel pated 13 Bearing 14 Reurn box Aluminium alloy Electroless nickel pated 15 Reurn plate Aluminium alloy Electroless nickel pated 16 Magnet 17 Wear ring holder Stainless Sise 25 , 150st only 18 Wear ring Resin Sise 25 , 150st only 19 Screw holwer pulley Aluminium alloy 20 Motor pulley Aluminium alloy 21 Belt 22

IDX-OM-W094

462 576 10 1) ANR 65% 2) IDFA60/70/80/90 Series 8-1 IDX-OM-W094 A 8.5 IDFA60/70/80/90 Series 8-2 IDX-OM-W094 C 9 C 9.1 9.2 1) 2) IDFA60/70/80/90 Series 9-1 IDX-OM-W094 L 10 L L 10.1 0 () 10.2 ADH4000-04 ADH4000-04 ADH-E400 ADH-E400 N.O. 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFA60/70/80/90 Series 10-1 IDX-OM-W094 L 10.3 Rc1/225 30 5 IDFA60 2722IDFA70,IDFA80,IDFA90 22

IDX-OM-W016

Install one-touch fitting (width across flats: 22) to drain port (width across flats: 27) and the drain tube. Nipple Heavy duty auto drain (Pilot exhaust port) Ball valve (Flushing button) (Bleed valve) 10-5 Maintenance 1. Check drain condition periodically (more than once a day). Then push flushing button to open exhaust valve. 2.

IDX-OM-W037

Checks and Maintenance Replacement part of Auto drain 4 14 1, Sotokanda, Chiyodaku, Tokyo 101-0021 JAPAN Tel: + 81 3 52 07 8249 Fax: +81 3 529 8 5362 URL http s://www.smcworld.com Note: Bowl insulation Description [ Revision ] Revision D July .20 22 2 pieces per model IDH Series 4.2 Periodical Maintenance 4 4 IDX-OM-W037 Thermo-dryer 4.

SI unit for DeviceNet TM

No.EX-OME0015-F PRODUCT NAME SI unit for DeviceNetTM MODEL / Series / Product Number EX120-SDN1(-X2/-X26/-X77) EX121-SDN1(-X2/-X26/-X77) EX122-SDN1(-X2/-X26/-X77) EX124U/D-SDN1(-X2/-X26/-X77) Contents Safety Instructions 2 How to Order 8 Summary of Product elements 9 Installation and wiring 11 Installation 11 Wiring 11 LED indication and settings 14 DeviceNetTM Objects 22 Troubleshooting

Precision Regulator

Recommended tightening torque (Nm) Thread size 1/4 3/8 1/2 Torque 12 to 14 22 to 24 28 to 30 -9- (2) Do not apply torsion or bending moment other than the weight of the product itself.

Coolant valve

Rc1/4 12 to 14 Rc3/8 22 to 24 Warning Rc1/2 28 to 30 Rc3/4 45 to 50 Rc1 65 to 70 Rc1 1/4 80 to 90 Rc1 1/2 100 to 110 Rc2 140 to 150 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 5 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 3 Be sure to read this before handling.

SI unit for EtherCAT

Colour on the feed holes Cable colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-28No.EX-OMN0011-F (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [

SI unit for PROFINET

Colour on the feed holes Cable colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-34No.EX-OMO0030-E (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [

KQ-OMS0022

Cresol Amylene Chromic acid [10%] Sulphurous acid gas (Humid gas) Chlorosulfonic acid Sodium bisulfite [50%] Chlorofluorocarbon (CFC) 11 Allyl alcohol Chlorofluorocarbon (CFC) 113 Benzoic acid Chlorofluorocarbon (CFC) 12 Ammonia (Compressed gas) Chlorofluorocarbon (CFC) 13B1 Isopropyl alcohol Chlorofluorocarbon (CFC) 14 Isophorone Chlorofluorocarbon (CFC) 22

Precision Regulator

Recommended tightening torque [N-m] Thread 1/4 3/8 1/2 Piping Warning IN OUT port 12 to 14 22 to 24 28 to 30 EXH port 8 to 10 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

Solenoid Valve

If the stain is persistent, wipe off with a cloth soaked in a dilute solution of neutral detergent and wrung out tightly, and then finish with a dry cloth. 15 No.VQC1000V-OMM0002-B 16 No.VQC1000V-OMM0001-B 17 No.VQC1000V-OMM0001-B 18 No.VQC1000V-OMM0001-B 19 No.VQC1000V-OMM0001-B 20 No.VQC1000V-OMM0001-B 21 No.VQC1000V-OMM0001-B 22 No.VQC1000V-OMM0001-B 23 No.VQC1000V-OMM0001-B 24 No.VQC1000V-OMM0001

Fieldbus system (SI unit – PROFIBUS DP compatible)

No.EX-OME0014-F PRODUCT NAME Fieldbus system (SI unit PROFIBUS DP compatible) MODEL / Series / Product Number EX250-SPR1 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product Parts 8 Mounting and Installation 9 Installation 9 Wiring 10 Setting 15 Troubleshooting 22 Specification 28 Specifications 28 Dimensions 29 -1No.EX-OME0014-F Safety Instructions

Fieldbus system PROFIBUS DP compatible SI unit

Byte 2 Station status 3 Standard diagnostic data Byte 3 Master PROFIBUS DP address Byte 4 Manufacturer ID (MSB: 14h) Byte 5 Manufacturer ID (LSB: 11h) Byte 6 Header Byte 7 System diag.1 Byte 8 System diag.2 Byte 9 System diag.3 System diagnostic data Byte 10 System diag.4 Byte 11 Reserved : : Byte 18 Reserved Byte 19 Header Byte 20 Unit 0 to 7 Byte 21 Unit 8 to 9 Unit diagnostic data Byte 22

Fieldbus Device Handheld Terminal

(When power is supplied) 21 Configuration memory error. 22 System error. 23 Internal component has failed. -51No.EX-OML0011-C Parameter Setting Refer to the SI unit Operation Manual of protocol used. Unit type Unit symbol and displayed unit symbol of each unit are displayed.

IDX-OM-W013

Inclination from the vertical line should be less than 5. 3) Install one-touch fitting (width across flats: 22) to drain port (width across flats: 27) and the drain tube. Nipple Heavy duty auto drain (Pilot exhaust port) Ball valve (Flush button) (Bleed valve) Note 2) Prepare a drain piping of out port by yourself.

AMX-OM-D023-D

R 1/4 12-14 R 3/8 22-24 (Refer to tightening torque in the table on the right). R 1/2 28-30 Do not use a pipe wrench or pliers. They may break the R 3/4 28-30 R 1 36-38 product.