SMC Corporation of America
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Note2) Fixed units: Instantaneous flow rate: L/min Accumulated flow: L Connectable remote type sensor unit is PF2W5--1 (with analog output 1 to 5 V).

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS V V V V V V AS2002FS V V V V AS2052FS V V V V AS3002FS V V V V V V V AS4002FS V V V V 1 Use caution at the max. operating pressure when using soft nylon or polyurethane tubing. (Refer to the Web Catalog for details.)

) V V CC-LINK V D side U side 1 2 3 Stations SI Unit Part No.

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

AL-183H-V AL-162H-V FKM or EPDM Element opening 10 to 16 AL-181H-V AL-184H-V AL-163H-V Band Element w 20 to 24 AL-182H-V AL-185H-V AL-164H-V Case Note 1) The material of seals (AL-162H-V to AL-164H-V and AL-180H-V to AL182H-V) is EPDM.

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.

16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900), (1000) 50 60 (kg) ) 23 (mm/s) 2) 20500 10250 (mm/s 2) 3,000 (mm) 0.02 (mm) 20 10 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 56.4 (DC24V) A/B 800 / (V) DC2410% (W) 4) 100 (W) 5) 43 (W) 6) 141 7)

AQ 0.02 AT 0.02 Bottom 2-AS AR Water Resistant Type with Built-in Hard Plastic Magnet 14 MGGM V G5BAL Stroke Mounting type Bore size XC58 Slide bearing Water resistant cylinder Water resistant type with built-in hard plastic magnet V FKM seals (fluoro rubber) Water resistant 2 color indication solid state switch The auto switch magnet for this water resistant cylinder have been changed to

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV 3-wire (PNP) Grommet J79 H7B F7BV 12 V 2-wire

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC 24 V Yes Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 IC circuit 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water

, as the position of the V-band can be changed.

, D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15