PS-OMH0005CN

(mm 2) (mm) SMC(1) 0.81.0 ZS-28-C 1.01.2 ZS-28-C-1 26-24 (28) 0.14-0.2 (0.08) 1.21.6 ZS-28-C-2 1.01.2 ZS-28-C-3 1.21.6 ZS-28-C-4 22-20 0.3-0.5 1.62.0 ZS-28-C-5 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A -15No.PS-OMH0005CN-D No 8 7 CH4_OUT1 6 CH3_OUT1 5 CH2_OUT1 4 CH1_OUT2 3 CH1_OUT1 2 DC(-) 1 DC(+) -16No.PS-OMH0005CN-D ( ) ( ZS-26-A) PSE200-(M)NPN 5 +1 Max. 30 V80 mA 1 V DC(+) CH1_

AXTS-OMY0007

How to order Switching type -5 - 4.

XL-OMY0001

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

Air cylinder

The product can break, causing a risk of injury or damage to equipment. 5 - 5) The cylinder generates a large force. Install on a sufficiently rigid mounting base, taking this force into consideration.

MWP_E

Replace the switch with a new one if the problem is not solved. switch -18- Basic Construction Fig.5 MWPU63-40-5-** Assembly drawing Fig.6 MWPU63-40-5-** Assembly drawing Fig.7 MWPQ125-40-5-** Assembly drawing Fig.8 MWPQ125-40-5-** Assembly drawing -19- Fig.5 -20- Fig.6 -21- Fig.7 -22- Fig.8 -23- Revision history Initial Release SZ Edition A *Document report P.13 TP Edition B *Document report

CVRA1-E

(Remove the cover from the right and left sides.) (5) Remove the piston 4 with the rack 16 from the body 1 . (The rack has a specified mounting direction, so this should be checked when removing it from the body.) -3323 18 24 17 25 19 20 18 20 9 13 5 3 13 16 4 4 2 1 Assembly Procedure (1) Clean each part sufficiently before assembly to make sure no dust is stuck to it.

MHx-OMU0057

- 4. 5. 6. <> (1) (2) 2 7. 2-3. 1. 2. 3. 4. 5.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

5 Rated voltage [V] 24 VDC10% Check the Speed-Work Load Graph (Guide) in the WEB catalog.

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6) VXF-26CB VXF

VQC4000Series (Pilot Valve:V100)

Warning Connection thread Proper tightening torque (Nm) size (Rc) 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 6. Piping to products When piping to a product, refer to the operation manual to avoid mistakes regarding the supply port, etc. 6 No.VQC4000V-OMX0001 VQC4000 Series Precautions for 5 Port Solenoid Valve 4 Be sure to read before handling.

SI unit

Specifications 8 5. Description and Functions 9 5-1 LED indication 9 5-2 Terminal board 9 5-3 Address setting 10 5-4 Setting of Hold/Clear 11 6. Wiring 12 6-1 Communication wiring 12 6-2 Terminal resistance 13 6-3 Cable for communication line 13 6-4 Wiring to power supply 13 7. Troubleshooting 14 -1No.EX-OMF0012-B 1.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

VQ4000/5000 (Pilot Valve V100)

In the case of diodes, the residual voltage is approximately 1 V. 5 VQ4000V-OMV0001 VQ4000/5000 Series 5-Port Solenoid Valves Precautions 3 Be sure to read this before handling products. 2.

Air cylinder

The product can break, causing a risk of injury or damage to equipment. 5 - 5) The cylinder generates a large force. Install on a sufficiently rigid mounting base, taking this force into consideration.

LUBRICATOR

Please refer to the catalog when you select the model. 7 5.

In-line Air Filter

Metric size 2 1 5 L/min 140 mm 2 3 10 L/min 470 mm Symbol Applicable 2 tubing O.D. ZFC1 ZFC3 ZFC5 ZFC7 5 20 L/min 750 mm 2 7 100 L/min 1260 mm 1 2 2 3.2 3 4 4 6 5 8 6 10 7 12 Inch size A 1/8 B 5/32 D 1/4 E 5/16 F 3/8 7 - 2-2 Specifications Specifications Remarks Fluid Air, Nitrogen This product cannot be used in an environment exposed to chemicals.

XLG Series

Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal

Regulator Valve

VEX-OMA0002-E PRODUCT NAME Regulator Valve MODEL / Series / Product Number VEX1 Series Contents Safety Instructions -2,3 Precautions on Design / Selection -4 Mounting -5 Piping -5 Wiring -5 Lubrication -5 Air Supply -5, 6 Operating Environment -6 Maintenance -6 Specific Product Precautions -7 to 9 Trouble shooting -10 to 12 -1VEX-OMA0002-E Safety Instructions These safety instructions are

SI unit for EtherNet/IP TM

length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.