IDX-OM-W038

TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-1 7-1 D2022/7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Air preparation filter

June 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved -23-

IR10-OM00007

. -1EXH 7 1 4 -11- -12-12- Revision history A Sectional view filter deletion of P.5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

IR20-OM00008

EXH 7. 1 4 -11- -12- Revision history A Sectional view filter deletion of P.5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

VEX-OMO0001

MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa -6VEX-OMO0001 3 VEX1 3 Series 0 +0.1MPa 2 PE(ASN2-M5) 0.1MPa P1 O M5 P1 O VEX1-A30-3 O P1 P1 P1 M5 -7VEX-OMO0001 (PE) Best Pneumatics No. () VEX1333-03 G36-4-01 -8VEX-OMO0001 P1 P1 02A 3R (VBA1-10) 3R () PE 3R PE 2A / (VBA1-10) P1 O PE 3R 02A 3R 2A / 2A -9VEX-OMO0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S001

VBA2: Tightening torque: 24 Nm (M10) VBA1: Mounting holes (Inside) (1) (4) (1) (4) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. (3) (2) (3) (2) Mounting base VBA1 VBA2 VBAT05A1VBAT10A12008

VBA-OM-P018

R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20 VBA10A VBA11A 391 328 VBAT10A1 VBA20A VBA22A 170 522 454 417 367 170 180 120 312 Rc1/2 278 130 VBAT10A1-VBA2 IN OUT Rc3/8 39 VBA1 IN OUT IN IN OUT OUT VBAT10A 1 VBA2 VBA1 3NmM5 VBA1 VBA2 24NmM10 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-P019

VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S006

TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163 160 100 200 Rc3/8 257 60 A B C D E F G H I J K L M 278 130 39 Rc1/4 20 IN Rc3/8 Rc1/2 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc3/8 OUT (J) 170 180 120 312 411 IN (I) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S007

2007 VBA2/VBA4 1.0MPa SUS304 0~75 oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250 A B C D E F G H I J K L M 444 394 Rc3/8 59 494 444 Rc3/8 59 85 85 IN Rc1/2 Rc1/2 Rc3/4 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc1/2 Rc1/2 180 200 100 400 205 250 150 500 Rc3/4 413 OUT (J) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

PSxx-OMU0002CN

NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D A B -79No.PS-OMU0002CN-D 0.57 + 0.57 -80No.PS-OMU0002CN-D 2 (n ) <> <> 31n +3.5n -1 31n +3.5n -1 -81No.PS-OMU0002CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

ZISE20A.eng

Operation light (OUT2) 5 4 3 2 1 Brown Black White Gray Blue URL http://www.smcworld.com Lead wire (Brown) OUT1 OUT2 FUNC DC(-) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

PSxx-OMU0005CN

+39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -82No.PS-OMU0005CN-C Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

ZISE20B.eng

Operation light (OUT2) URL http://www.smcworld.com Lever Brown Black White Gray Blue 5 4 3 2 1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 OUT2 FUNC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

ZISE20B-L.eng

Operation light (OUT2) URL http://www.smcworld.com Lever Brown Black White Gray Blue 5 4 3 2 1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 NC NC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

ZISE20C.eng

Operation light (OUT2) URL http://www.smcworld.com Brown Black White Gray Blue 5 4 3 2 1 Lever Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 OUT2 FUNC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

ZISE20C-L.eng

Operation light (OUT2) URL https://www.smcworld.com Brown Black White Gray Blue 5 4 3 2 1 Lever Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 NC NC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

PSxx-OMS0006CN

2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

ZISE20.eng

URL http://www.smcworld.com Lead wire (Brown) OUT1 Black 4 NC 3 NC 2 DC(-) Blue 1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved PS-OMS0008-A

ZISE30A.eng

[F 0] Unit conversion function URL http://www.smcworld.com Unit specification Model Default setting Unit specification Model Default setting Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Nil or M ISE30A P ISE30A MPa psi ZSE30A(F) kPa ZSE30A(F) Note: Specifications are subject to change without prior notice and any obligation