Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

High Vacuum L Type Valve

Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2

25

Avoid using in a place where there is a strong magnetic noise (strong electric field, strong magnetic field, or surge). j. Avoid using in a place where static electricity is discharged to the body. k. Avoid using in a place where a strong high frequency occurs. l. Avoid using in a place where this product is likely to be damaged by lightning. m.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

J Setting of security code (F81) The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.

Dedicated Controller

(P-no.) label Condition jump General purpose input no., State OR input condition jump command J-OR (P-no.) label Program control commands T-bracket Parameter value Classification Function Instruction Jump Unconditional jump command (P-no.) label JMP Subroutine call command (P-no.) label CALL Sub-routine Subroutine end declaration RET Loop start command Loop frequency FOR Loop Loop end command

Fieldbus System

P, E port entry, SUP/EXH block assembly External pilot G H J Internal pilot U D B Internal pilot, Built-in silencer C Note) E Note) SI Unit common, End Plate type P, E port entry U side (2 to 10 stations) P, E port entry D side (2 to 10 stations) P, E port entry both sides (2 to 24 stations) Power supply with M12 connector SI Unit common Power supply with 7/8 inch connector Nil Without SI

ChemicalThermo-con

Heat generation amount Q : Unknown : 1.0C (1.0 K) : 20C (293.15 K) : 21C (294.15 K) : 7 L/min :Water : Density : 1 x 103 kg/m3 Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid inlet temperature T2 Circulating fluid flow rate L Circulating fluid : Specific heat C: 4.2 x 103 J/(kgK) T1: Outlet temperature Q = T x L x x C 60 x 1000

Series 12-REA Sine rodless cylinder

2-Port size D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

16 0.090 J Smooth Cylinders Low Speed Cylinders Minimum Operating Pressure Unit: MPa Bore size (mm) 10 16 Minimum operating pressure 0.03 Standard Strokes Made to Order (For details, refer to pages 174 to 191.)

Power Clamp Cylinder

(Clamp Cylinder Without Arm) CKZT50, 63, 80 Release point XA CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA RA XB RR XC Nh9 R NA0.02 NC RW LB For Asia For North America For Europe For France Special NB0.05 PD0.05 VC0.1 VB0.1 VD0.05 PA0.02 PC0.05 GC +0.1 K 0 PB0.02 GA GB VF LA0.1 VA0.02 C VE L 2 x 2 x P H7 depth D 2 x V H7 depth I 4 x NN depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J