High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Compact Manifold Regulator

K Port plug Refer to page 738.

Pin Clamp Cylinders

SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 7.5 075 7.6 076 7.7 077 7.8 078 7.9 079 8.0 080 11.5 15.5 8 6 20 12 8.5 20 16 11.5 25 3.5 3.5 5 5 10.9 6 6.5 14.3 8.5 085 8.6 086 8.7 087 8.8 088 8.9 089 9.0 090 12.5 17.5

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Series CQ2K/CDQ2K Dimensions: 40 to 63/With Auto Switch Basic style (Through-hole): CDQ2KB Both ends tapped style: CDQ2KA Both Ends Tapped Style Bore size (mm) R O1 O1 thread R R 40 50 63 M6 x 1.0 M8 x 1.25 M10 x 1.5 10 14 18 H thread effective depth C F 2-P Q U 4-N through-hole 8-O counterbore Piston rod cross section (Port size) I (D) Th9 K (K) 22 Z M E Courtesy of Steven Engineering,

Modular Type Regulator Series AR

Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

LJ1H

Model Allowable Moment (Nm) Regenerative Absorption Unit Selection Guide LJ1H1021PH-K (Power supply voltage 100VAC) LJ1H1022PH-K (Power supply voltage 200VAC) Allowable static moment m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching Yawing 10.2 10.2 350 400 350 400 8kg 6kg 300 300 Allowable dynamic moment

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

1

Please contact SMC for dimensions since A, AL, D, K, MM, W, H, ZZ dimensions are different from standard. Please contact SMC for dimensions since A, AL, D, E, EA, F , FA, K, MM, H, ZZ dimensions are different from standard.

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

CRQ2

10, 15, 20, 30, 40 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com K 20, 30, 40 CRA1 10, 15, 20, 30, 40 CRQ2 20, 30, 40 MSQ XA38 K 10, 15, 20, 30, 40 K J XA45 K K MRQ DCombination Chart of Made to Order 20Chart 4.

Refrigerated Air Dryers

Moderate pressure specification (up to 1.6 MPa) IDU3E to 15E1 IDUmE-m-K IDF100F to 150F IDFmF-m-K IDF4E to 75E IDFmE-m-L Refrigerant R407C (HFC) IDF F With a heavy-duty auto drain*1 (applicable to moderate pressure) IDF370D IDF370D-m-L IDU3E to 75E IDUmE-m-L With a motor type auto drain*2 IDF4E to 75E IDFmE-m-M p. 30 IDF190D, 240D IDFmD-m(-m)-M IDU3E to 75E IDUmE-m-M With a metal name plate

energy saving effect

Applicable model Dimension [mm] A B HRSH100---K HRSH150---K HRSH200---K HRSH250-W--K Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port 56 271 609 HRSH250-A--K HRSH300-A--K 372 708 B A Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port Cap 56 Fluid fill port B A (The figure shows the HRSH250-A-20-K.) 178 Options HRSH Series Option

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) : For thread type: NPT only 1075 A 1021-AR-B Regulator 1021-ARK-B Regulator with Backflow Function Standard Specifications 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size 1/8 Air Preparation Equipment Pressure Control

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

A

H O W T O O R D E R C H E C K VA LV E S E R I E S (N)AKM D I M E N S I O N S C H E C K VA LV E S E R I E S NAKM S Y M B O L S (N)AKM Japanese N North American P O R T S I Z E B O D Y S I Z E 01 18 02 14 03 38 20002000 Series 30003000 Series 40004000 Series P O R T T H R E A D mm Rc(PT)* Remove (N) when ordering N NPT Model Port Size A B C D E NAKM2000 18 14 40 40 28 11 11 NAKM3000 18 14

SQ1000/2000

N.C. 1 5 3 (K) (Y) 5 6 5 6 5 6 4 For single VQ110SLJ12-1 Negative COM: VQ110SNJ12-1 5 For double (latching) For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110S (N)J13(B)-1 For 3P, dual 3 port on A side For double (double solenoid) on B side (K) (Y) 5 6 7 VQ111S (N)J14-1 For 3P, dual 3 port on B side Note) Nil: Standard B: Locking type manual override N: Negative COM specification