In-line Air Filter (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch
210 L/min (Displays [ 0] when the value is between -1 and 1.)
/4 G1/4 40 10 54 31 3 6.7 19 109 49 6 20.6 12.5 23 Rc1/4 NPT1/4 G1/4 Note 1) Dimensions when equipped with auto switch are the same as drawing above.
Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.
) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) Atmospheric pressure dew point F (C) How to read the dew point conversion chart Example) To obtain the atmospheric pressure dew point at a pressure dew point 50F (10C) and a pressure 102 psi (0.7 MPa). 1.
1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2
[l/min] 954 Flow Sensor Series PFMV5 Dimensions PFMV5-1 PFMV5F-1 0.8 34.4 10 2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through
range 5 to 500 L/mim 10 to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated
VE Ozone resistant VY1 IRM 10 3 G 4 For High/Low Temperature Environments Set pressure and quantity Stations G 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs. 2 2 stations Standard model no.
the GFCI . 9 1 Chapter 10 Specification for Option S 10 1 Safety instructions. 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions. 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 2 11 4 How to connect the power supply and signal cable . 11 2 11 5 Electric wining diagram . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions
Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2
Baud rate Table Baud rate SW1 SW2 SW3 SW4 1000 0 0 0 0 800 1 0 0 0 500 0 1 0 0 250 1 1 0 0 125 0 0 1 0 1 0 1 0 50 0 1 1 0 20 1 1 1 0 10 0 0 0 1 : CAN LED illuminates RED when an invalid combination is set with DIP switches SW1 to 4.
Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10
3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only
8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25 20 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32
KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 16.0 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 M12 1 14 14 15.0 15.5 17.0 15.5 15.5 19.5 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 4 13.6 17 17.0 M14 1 6 17 17.6 18.5 21.0 18.5 21.0 M16 1 M20 1 M16 1 M20 1 19 24 19 24 8 10 8 10 22 25.2 18.5 22.0 12 M22 1 27 24 18.0 27.0
80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.
Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)
(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991