High Vacuum L Type Valve

17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66 XLS-16-P*G 40 96 113 38 30 35 17 23 87 66.5 XLS-25-P*G 50 121.5 138.5 48 40 40 26 25.5 89.5 69 9 XL*-OMI0013-B 6.Period and Scope of Warranty The waranty period is 0.5 million cycles (under SMCs endurance test conditions), 1 year

Compact Guide Cylinder

M8 x 1.25 20 M8 x 1.25 6.7 11 9 Rc1/8 NPT1/8 G1/8 16 16.5 41 28 92 42 106 82 98 72 50 12 140 M8 29.5 29.5 43 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 13 19 49 35 115 52.5 133 104 122 92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16

Cylinder with Turntable Series MGT

188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 70 80 100 14 14.5 17.5 G 1/4 G 3/8 G 3/8 63 80 100 110 140 166 142 180 210 28 25.5 32.5 NPT 3/8 NPT 3/8 (mm) 25st 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 10 Series ML1C Construction Component Parts Material No. Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Note Hard anodized Hard anodized Material No.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

12, 48 DC 15 to 10% of the rated voltage Allowable voltage (%) Power consumption (W) [Current: mA] (2) DC 1.8 (With indicator light: 2.1) [24 VDC: 75 (With light: 87.5)] Made to Order Specifications (For details, refer to pages 1843 and 1847.) 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz [ ] Start-up 4.5 to 50 Hz, 4.2/60 Hz Apparent power (VA) [Current: mA] (2) AC 100 VAC: 35

240

Table (1) (mm) d 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 OUT OUT port (Axial piping) IN d L Dimensions of a shielding plate (MU-S025) that is sold separately are indicated as reference. OUT port (On both sides) IN port (Axial piping) IN port (On both sides) 18 36 When changing the port location, please order the following plug.

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

CYV

inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18 35

AS-FPQ/AS-FPG

AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12 R 1/8 14.3 33.4 18 18 19.4 26.3 12.8 35.6 20 20 21.9 28.5 15.2 37 33 33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port A C 32 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 3-3 depth 6 +0.02 0 (A, B, C common view) 6-M3 x 0.5 thread depth 6 (A, B, C common view) 29 9h9 0 0.036 32 1 5 15 10 (35

Flow Control Equipment

Universal mounting Model Size (nominal X height) Piece Metric Inch TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 X 15 M3 X 20 1 M4 X 25 TMH-08 TMH-10 TMH-12 M4 X 35 The holder can be used to secure an individual part.

IR1000/2000/3000

EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5 depth 7 75 83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43

Low torque Metal seal type Rotary joint

Temperature rise is reduced by supply of air. 2 Series MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR1-M5 Width across flats: 14 Width across flats: 7 (16.2) M5 x 0.8 14 5 21 34 (8) R1/8 M5 x 0.8 MQR2-M5 MQR4-M5 * 35 * 29 3 +0.1 0 M4 x 0.7 thread length 8 depth 10 5.5 2-M3 x 0.5 thread length 6 P.C.D.38 M5 x 0.8 thread length 10 0.03 * flange: MQR2-F (for

“Going to

Burst prssure Min. bending radius (mm) 10 15 20 27 35 10 15 23 27 35 20 to +60C (Water: 0 to 40C) (No freezing) Polyurethane Operating temperature Material Precautions How to Order Be sure to read before handling.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

thread) 33.4 MDHR2-10E port position 32 B 36 8.5 120 120 9.5 A C 32 Finger opening port M3 X 0.5 Finger closing port M3 X 0.5 25 25 MHZ2 3-3 depth 6 +0.02 0 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port (A, B, C common view) MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ MHL2 Auto switch mounting groove 29 MHR 9h9 0 -0.036 2-4.2 MHK 9.6 4.7 32 1 MHS 4.7 3 10 2-3 (35

ML1

22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 X 1 M8 X 1.25 116.5 14 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35

AS-FPQ/AS-FPG

AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12 R 1/8 14.3 33.4 18 18 19.4 26.3 12.8 35.6 20 20 21.9 28.5 15.2 37 33 33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35

CYP

cushion) Port size M5 x 0.8 Rc 1/8 Weights (kg) Standard stroke (mm) Model 100 150 200 250 300 350 400 450 500 600 700 CYP15 1.2 1.4 1.6 1.7 1.9 2.0 2.2 2.4 2.5 2.8 3.2 CYP32 4.2 4.6 5.0 5.5 5.9 6.3 6.7 7.1 7.5 8.3 9.1 Magnet Holding Force Magnet holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.3 0.2 0.1 15 53 35

CYPSeries

1.9 (4.2) 5.9 (13.0) 250 1.7 (3.7) 5.5 (12.1) 200 1.6 (3.5) 5.0 (11.0) 500 2.5 (5.5) 7.5 (16.5) 400 2.2 (4.9) 6.7 (14.8) 350 2.0 (4.4) 6.3 (13.9) CYP15 CYP32 1in = 25.4mm Magnet Holding Force Magnet holding force N (lbf) Bore size (mm2) 15 59 (13.3) 32 268 (60.2) Theoretical Output N (lbf) Piston area (mm) Operating pressure MPa (psi) Bore size (mm) 0.2 (29) 0.1(14.5) 0.3 (43.5) 15 176 35