Body Size/Type: 42 (Elbow Size 04 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: (R Thread or In-Line Type), Port Size: 04 (1/2), Applicable Tubing O.D: 10 (ø10), Sealant: S (w/Sealant)

), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SYJ 5 port valve manifold, 4/5 PORT SOLENOID VALVE, VVD, 101.00000 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SYJ 5 port valve manifold, 4/5 PORT SOLENOID VALVE, VVD, 101.00000 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SYJ 5 port valve manifold, 4/5 PORT SOLENOID VALVE, VVD, 101.00000 lb

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

α PneuAlpha HARDWARE MANUAL

-57 Hz: 0.075 mm Constant Amplitude 57-150 Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) 9 PneuAlpha Hardware Specification 2 Table 2.8:Environmental and Electrical Specications Insulation Resistance

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $3.81 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-51A-C6 fitting assy, VQ1000/VQ20/VQ30 VALVE (sold in packages of 10; price

High Purity Fluoropolymer Needle Valve Series LVN 1

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

0.01

Maximum Flow Rate 1000 SFD200-C12, -02 SFD200-C08 SFD200-C10 Flow rate (L/min(ANR)) SFD100-C08, -02 A 100 SFD100-04 SFD100-06 10 0 0.5 1 Pressure (MPa) 320 Clean Air Filter SFD Series RoHS HAA HAW How to Order AT IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) Option Option None Bracket (SFD100 only) IDFB Symbol 1 2 Symbol Nil B IDH

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

00015 -0.00047 o'u %.ooto 4.120.73 0.350.02 0.39 0.s4 tvt3 {0.20) 10"32UNF M3x0.5 NCDRBTBWl5 1.340.94 0.98011 -{.01 -0.00017 0.47 0 -{.0017 0.160.730.390.020.5950 1 . 1 4 M3 10.20) 10-32UNFM3X0.5 NCDRBlBW20 1.651.32 1.00 0.79 -0.0015 -0.00045 0 0.0016 0.180.980.390.02 0.79 50 1.42 8-32UNC (0.28) 10-32UNF NCDRBlBW3O 1.97't.791.00 -0.0002 -0.0006 0 -{.0016 0.200,98 0.47 0.04l . r 850 1.69 '

NCRBIBwserbs

00015 -0.00047 o'u %.ooto 4.120.73 0.350.02 0.39 0.s4 tvt3 {0.20) 10"32UNF M3x0.5 NCDRBTBWl5 1.340.94 0.98011 -{.01 -0.00017 0.47 0 -{.0017 0.160.730.390.020.5950 1 . 1 4 M3 10.20) 10-32UNFM3X0.5 NCDRBlBW20 1.651.32 1.00 0.79 -0.0015 -0.00045 0 0.0016 0.180.980.390.02 0.79 50 1.42 8-32UNC (0.28) 10-32UNF NCDRBlBW3O 1.97't.791.00 -0.0002 -0.0006 0 -{.0016 0.200,98 0.47 0.04l . r 850 1.69 '

VN-OMP0002

(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11

One-touch installation and removal Series DM

GEnlarge cover and mount cover onto mounting area. 3 1 C 2 4 5 Cover mounting area Cover How to Order N 04 DM 6 Number of connecting tube 6 12 6 12 Accessories(optional) 1 cover(One side) 2 covers(Both sides) C1 C2 Type Tube material P 12 Multi-connector Plug side Socket side N Nylon Soft nylon Polyurethane NU Tube O.D. 4mm 6mm 04 06 70 Series DM Multi-connector Dimensions (mm) DM6 Panel