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Class H coil: AWG18 Operating Port Tightening Torque Class B coil: AWG20 Torque (Nm) Operating port M5 1/6 turn with a tightening tool after first tightening by hand 0.8 to 1.0 (1) Rc, NPT 1/8 0.8 to 1.0 SMC 2. Use of metal fittings Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. 3.

Note 2) JIS B 8370: Pneumatic system axiom. 1 The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Replacement method Standard replacement period Refrigerating compressor 1 B 20,000 hours (6 years) High pressure switch 1 B 20,000 hours (6 years) Low pressure switch 1 A 20,000 hours (6 years) Pressure switch 1 A 20,000 hours (6 years) Magnetic contactor 1 A 20,000 hours (6 years) 2 Fan motor A 20,000 hours (6 years) (Only IDF150F: 3) Programmable controllers 1 A 20,000 hours (6 years) Switch

x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Note 4) M5 fittings for M5 thread are attached without being incorporated.

10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107

Refer to page 97 for details. 67 Regulator Series AR10-A Regulator Series AR20-B to AR60-B Regulator with Backflow Function Series AR20K-B to AR60K-B Flow-rate Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AR10-A M5 AR20(K)-B Rc1/4 AR25(K)-B Rc3/8 AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) -95No.PF-OMX0002-B Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 -96No.PF-OMX0002-B Lead wire with M12 connector (ZS-37-A) Pin

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10

8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 -2VEX-OMO0001 1 1 1 1 1 1 1 1 3 3 3 3) ) ) ) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () -3VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / Nm , 1.5~2 1/6~1/4 2 (P.2.3) , (P.2.3) 1 1 1 1 P P P P 2 2 2 2 A A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001 3 VEX1

CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection. When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch.

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12