Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: N (Non-relieving)

Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1Z (1+Z)

Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: N (NPT), Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: NZ (N+Z)

Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: None, Option: 1N (1+N)

Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: N (NPT), Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

VFR

1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/Surge voltage suppressor) Applicable connector: 26 pins MIL type

VFS

3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

H : About 600 (Lead wire length) 4 5 91.7(GZ:93.1) [95.1] 19.5 1.5 78.8(GZ:80.2) [82.2] 17 33 5 R P 53.9(GZ:54.6) [55.6] 52.9(GZ:53.6) [54.6] 7 10 A P R A A A A 14 11 10 29 32 R B B B B B R 6-M5 0.8 (P, R port) 23.5 (Mounting holes) 2n-M3 0.5 (A, B port) (Pitch) P=10.5 9 Manual override L2 3.5 L1 (Non-locking) Manual override 42 [48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type

MY1

MY1HT50/63 R L L R L R L R L R Slide table operating direction 8-11-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8-11-10 11 Basic Type Series MY1B MX MTS MY 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Stability of suction position,

0 are used for both the flat type with groove and the bellows type with groove. 63 to 125 Male thread Female thread r i r i r i r o r i o % b !

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.