ARM10/11

L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

HRX-OM-M005

2 22 12 ANALOG INPUT 24 13 EMO signal 25 5 18 24COM +15V 100 + 11 -15V 23 ANALOG COM +15V ANALOG circuit 100 + 10 -15V 22 ANALOG +15V COM 12 + -15V 1M 24 ANALOG *1: The recovery signal can be input only when the COM circulating fluid automatic collection function 13 25 EMO SW (optional) is used, and it does not serve as the DIO REMOTE signal.

Compact Rotary Actuator Series CRQ2

D: Shaft dimension S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU CA CB F H J JA JB Size Rotating angle 20 30 40 90, 180, 360 63 (11) 14 34 14.5 30.4 7 4.7 10 2.5 30 M 8 x 1.25 11 6.5 50 25 90, 180, 360 69 (11) 14 39 16.5 49 16 34.7 8.1 4.9 12 3 32 M10 x 1.5 14 8.5 68 30 90, 180, 360 78 (13) 16 47 18.5 55 16 40.4 8.3 5.2 15 3 36 M10

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Station 11 11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station

HRX-OM-T002

30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

TABLE OF CONTENTS

LEAD EGRESS .11 (2.8) DIA. WIRE .25 (6.4) DIA. Nominal Power: D.C. VALVES A.C. VALVES 5 Watts 3.3 watts 2.24 (56.9) 1.25 (31.8) .63 (16.0) Coil Construction: Standard, Molded with 24 leads.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

Micro Mechanical Valve Series VM1000

P.T. 3 port (A) 2 R port (3 port only) 32 12 10 1 (P) 3 (R) 49 (84) 52 22 13 32 16 2 x 5.5 mounting hole 2 x 1/4 * 0.5 MPa supply 25 30 F .O.F .* 24 N P .T. 6.5 mm O.T. 4.5 mm T.T. 11 mm 40 One way roller lever VM220-02-02A VM230-02-02A VM220-02-02SA VM230-02-02SA Symbol 2 port 17 Polyacetal or hard steel roller (62.3) (A) 2 34.9 25 10 12 T.T. O.T.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(Retraction end adjuster) 27 23 6 2 7 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 3H9 ( ) depth 3 +0.025 0 HA GA NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 3 +0.025 0 A B 1 14 7 7 3.2 3.2 6.5 A B H (NN 1) x H G 12.5 12.5 5.7 5.7 A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11

Guide Cylinder/Compact Type Series MGC

70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth 21 45 82.5 115 150 75 38 M8 x 1.25 1/8 115 12 47 T U V W WH W X Y Z Bore size (mm) 20 25 32 40 30 16 112 53 50 23 30 146 182 30 20 132 63 60 25 37 167 199 25 20 132 63 60 28.5 37 167 202 20 25 162 73 70 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke R Z Y Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32

Electric Actuator with Integrated Guide

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

27 17 84 25 6 19 8 1/4 3/8 3/8 1/2 1/2 Refer to p.3.8-18 for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

15 SMC 27 34 2 8 Cover diameter 1.4 Cross sectional area 0.2mm2 3.5 20.5 34 Manual override M3 x 0.5 External pilot port 22.7 Mounting holes (Only external pilot port type(R)) 25 10 (N3T, N7T) (M5T) 2-M2.5 x 0.45 Thread length 4 9 9.2 30 20 2.1 12.5 2.5 5 5.2 4.1 28 23.2 Mounting holes 4.5 G(PF)1/16 R port 29.5 10 1/8 NPTF P port Foot bracket PE port P 1 3 R 11 14.5 40.3 22.2 Die cast hole