CE2

to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5

RB/RBL/RBQ

Basic type RBC10S RBC14S RBC20S RBC27S With cap A B 9 12.5 16 21 SR 8.7 12 18 25 MM h M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 6 6 6 C 14 19 27 36 B M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f MM RBC10C RBC14C RBC20C RBC27C RB10J RB14J RB20J RB27J RB10S RB14S RB20S RB27S 7.5 10 20 25 16.2 21.9 31.2 41.6 14 19 27 36 16.2 21.9 31.2 41.6 8 11 16 22 23 31 40 51 11 15 23 32 15 20 25

CM2, low friction type, Mountings: 12 options available, Bore sizes: 20, 25, 32, 40mm, Strokes up to 300mm as standard, Auto switch capable, 20MM CM2X DBL-ACT CLEAN ROOM, ACTUATOR, CM2X MICROSPEED CYL, H5, 20MM CM2X DBL-ACT CLEAN ROOM, 1.27859 lb

MXW

100 100 20 40 60 75 50 25 Load (N) Load (N) Load (N) Data MXW20/25 MXW20/25 MXW20/25 0.10 0.03 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW25 MXW20 MXW25 MXW20 0.08 MXW25 MXW20 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 300 200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide

VZS

(n) 7 stations (15 stations) New D-sub connector VQ7 Conventional D-sub connector (2) (1) Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White 8 stations (Max. 16 stations) Terminal No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Dot marking None None None None

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center Rubber seal 8.1 (0.45) VQZ2521 25 or less 33 or less Metal seal 12.6 (0.7) VQZ3120 17 or less 22 or less Single 109 Rubber seal 16.2 (0.9) VQZ3121 25 or less 33 or less 2 position Metal seal 12.6 (0.7) VQZ3220 10 or less 13 or less Double Rubber seal 16.2 (0.9) VQZ3221 15 or less 20 or less Metal seal 10.8 (0.6) VQZ3320 25 or less 33 or less Closed center VQZ3000 Rubber seal 12.6

240

50 Product weight [kg] Basic 0.29 0.35 Model LEPS10 Standby power consumption when operating [W] Note 10) Basic 11 22 Compact 16 Max. instantaneous power consumption [W] Note 11) Basic 22 55 Compact 45 Stroke [mm] 25 50 Product weight [kg] Basic 0.56 0.65 Compact 0.50 0.59 Note 1) Pushing force accuracy is LEPS6: 30% (F.S.), LEPS10: 25%(F.S.).

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

43.6 44.6 23.5 24.2 25.2 32.6 33.7 35.2 32.6 38.3 39.1 40.6 41.8 51.1 52.1 20.7 21.4 23.5 24.2 6 7 8 12 13 22 25 36 40 44 48 85 89 6 7 12 9 12 18 16 24 22 25 36 40 52 93 106 38 39.2 40.7 40.7 44.8 53.2 59.8 59 64.4 71.6 76 77.7 82.1 4.5 5.2 6.2 5.2 6.3 6.7 8.1 7.4 8.2 9.8 11 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 59 64.4 70.8 76.9 83.1 8.4 9.3 11.6 9.3 11.6 12.8 15.2 12.8 15.2 18.5

4-channel Flow Monitor ( compatible)

Max. 4 Accuracy Repeatability 3.0%F.S. 4 Temperature characteristics 0.5%F.S. (25 oC standard) -101No.PF-OMA1011-A Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Output type NPN or PNP open collector output5 output Output mode Hysteresis, window comparator, accumulated output, accumulated pulse output, error output, output OFF Switch operation

Series KP/KPQ/KPG

21.5 22 15 11 15.2 4.2 10 KPQL10-00 KPGL10-00 29.4 6.8 24 35 25 16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

21.5 22 15 11 15.2 4.2 10 KPQL10-00 KPGL10-00 29.4 6.8 24 35 25 16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Hydraulic Cylinders

Mounting Heights for Stroke End Detection 20 & 25 Proper auto switch mounting positions (mm) B D-F9 D-F9V D-F9W D-F9WV D-A9 D-A9V D-A9 D-F9 D-F9W D-F9BAL Bore size (mm) SMC D-A90 B 15 16 A 12 13 B 19 20 A 11 12 B 18 19 A 8 9 SMC D-A90 20 25 A Approx.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lead wire with connector 1.5 45 44 1.5 F02 C01 25 8.5 25 8.5 M5 x 0.8 Thread depth 5 G1/4 Rc1/8 17 Piping port Rc1/8 Piping port G1/4 Gasket 1.5 52.7 46.7 1.5 A2 B2 25 8.5 25 8.5 URJ1/4 TSJ1/4 Piping port URJ1/4 Piping port TSJ1/4 28 ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) Piping direction Piping specification 25 41.7 1.5 2 x 2.6 Depth 12 or less 12 11 4.5 02L 30 4.5 R1/

Pin Clamp Cylinders

20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 11 7.5 20 15 10.5 25 4 4.5 9.8 6 6 13.3 534 Pin Clamp Cylinder Compact Cylinder Type C(L)KQG32 Series Dimensions CLKQGl32 (Clamping height HIGH type) The figures below indicate the CLKQGB32-lRCH-X2082.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

CEx-OMQ0013

~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%]

ZQ-OM01401

3 7 HNBR P.25 6 8 SUS 9 10 PC P.25 4 11 SUS 12 PVA P.25 5 13 P.2223 1 14 PBT 15 P.2425 2 16 (V) P.25 7 17 Ass'y P.25 9 O HNBR,NBR 21 - No.ZQ-OM01401-B 7.2 1 N.C., ZQ1-V114-5LUB-A (1) (2) (1) L L 0.3m LO L (2) B N.O. () ZQ1-V124-5MUB-A (1) (2) (1) M M (0.3m) MO M () (2) B () ZQ 1VQ110 L -5 L -A (1) (1) L L 0.3m LO L 22 - No.ZQ-OM01401-B Assy N.C.N.O.Assy 1) SY100-30