VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.

JXCx-OMT0028CN

mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

Compact Hydraulic Cylinder

11 100 20 25 98 28 57.5 89 26 17.5 depth 13.5 77 11 Rc3/8 112.5 100 M20 x 2.5 156 6.5 26 12 107 24 30 117 29 67.5 95 26 17.5 depth 13.5 94 11 Rc3/8 132.5 Rod end male threads (mm) H C D L K X Bore size (mm) 20 M8 x 1.25 15.5 10 23 8 18 32 M14 x 1.5 27 16 38.5 14 30 40 M14 x 1.5 27 16 38.5 14 30 M18 x 1.5 50 32 20 46 18 35 M18 x 1.5 63 32 20 46 18 35 M22 x 1.5 37 25 51 22 80 40 M26 x 1.5

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

OMR0032

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100

Clamp Cylinder with Lock Series CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

AS-FG/ASD-FG

18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG-03-10 AS321FG-N03-09 59 21 31.8 43.3 18.5 10 15.2 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 31.8 43.3 AS321FG-03-12 AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11 100 21 33.6 47.9 18.5 10 17.9 3/8" 21 100 R(PT) 1/2 NPT 1/2 23.8 25.4 28.6 50.1

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper No rubber bumper Double-side

39

A002 CKZ Arm 63 Arm code (Refer to page 3 and 8 through to 11.)

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2 Series VQ7-6 DIN Connector Type 2 position/Single : VQ7-6-FG-S Single (reverse pressure): VQ7-6-YZ-S 50 68.5 52 120.5 68.5 120.5 2-6.5 Mounting hole 50 25 25 42.5 42.5 13 (port A) 13 (port B) 3-Rc3/8 (R1, R2) Manual override R1 R2 P B A 14 50 62 11 9 12 38 50 62 13 A B R1 R2 P 2-Rc1/8 13 34 Indicator

AZ1000

Changes from the standard type are: AZ1001 AZ1002 AZ1006 AZ1015 AZ1010 Option Other Parameters HF Cv Supply pressure effect 0.15 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Wetted Parts Material Flow Characteristics AZ1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) S SHP Wetted Parts Body Surface finish Poppet