Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

Refrigerated Air Dryer

) 71 (120) Outlet air pressure dew point IDF IDU 45F (7.2C) 11 (19) 16 (27) 26 (45) 43 (74) 62 (106) 80 (136) Outlet air pressure dew point SCFM Note 1, 2) (m3/h (ANR)) 50F (10C) 12 (20) 17 (28) 28 (47) 45 (77) 65 (110) 86 (147) Outlet air pressure dew point IDFA psi (MPa) Operating pressure 100 (0.7) F (C) Inlet air temperature 100 (37.8) IDFB IDFB F (C) Ambient temperature 100 (37.8) Single-phase

MY1

200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW: m3 MY1CW: m2 MY1CW: m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Weight (kg) Model 0.51 CHNB20-100 0.63 CHNB25-100 48mm 0.89 CHNB32-100 63mm 1.51 CHNB40-100 Basic type with a 100 mm stroke Series Variations Nominal pressure Series Bore size (mm) Mounting bracket Auto Switch 20 Basic type Axial foot type Front flange type Rear flange type Single clevis type Band mounting type 25 Reed type CHN 7.0MPa 32 Solid state type 40 Features 1 Hydraulic Cylinder

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Connection Port CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 270 90 180 270 90 180 270 90 180 270 180 270 Rotating angle Single vane Double vane Volume (cm3) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 25 31.5 41 1(0.6) 1.5(1.0) 4.8(3.5) 11.3(8.5) Side ported M5 x 0.8 Port size Axial ported M5 x 0.8 M3 x 0.5 90 100 90 100 90 100 90 100 90 100 Rotating angle Volume (cm

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

Thermo-chiller/Rack Mount Type

100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water

Rotary Actuator/Vane Type

Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3

Compact

400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

HRX-OM-Y098

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

Environment

LES LEPY LEPS LER LEH Motor output/Size 100 W/40 200 W/60 Motor type AC servo motor (100/200 VAC) AC servo motor (100/200 VAC) Electric specifications LEY -X5 LEY -X5 Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute/incremental dual 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 11) Horizontal 45 65 65 Vertical

New

6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Selects the required communication speed and communication method. 10 HDX 11 BUS OUT port setting 10 FDX Unit 100 HDX 100 FDX 1: This function is valid only when "Hold/Clear priority" of the system parameter is set to "Via software". 2: Some PLC does not support an idle mode. 3: The count is memorized every hour.