VQ4000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A B A A VQC 10 11 13 12 15 14 11 10 12 13 14 15 SQ 9 8 7 6 5 4 3 2 1 0 3 2 1 0 4 5 9 8 7 6 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ0 VQ4 Name of terminal block (LED) Note ADDRESS NO. STATION NO.

C95

K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9

SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1

Modular F.R.L. Units

*15 *15 *15 *15 *15 *15 *15 ZA*14 Digital pressure switch: With unit selection function *16 *16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

MGG

25 32 40 50 20 25 32 40 50 37 25.3 157 30 40 20 25 32 40 50 12 (14) 21 47.5 107 (115) 11 104 40 28.3 175 37 46 12 (14) 21 48 107 (115) 11 104 43 31.3 201 37 52 12 (14) 21 49 110 (118) 11 106 52.5 38.3 238 44 62 12 (15) 25 53 121 (130) 11 123 58.5 44.5 285 55 75 14 (16) 26 59 137 (149) 16 140 For long strokes Bracket mounting strokes Note) Dimensions inside ( ) are for long strokes.

HRX-OM-S004

C, use a 15% aqueous solution of ethylene glycol. Tap water may be frozen in the thermo-chiller which may damage the product. 3.5 Circulating Fluid Supply HRS Series 3-32 HRX-OM-S004 Chapter 3 Transport and Setting Up 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double: SYJA3220-M3(-F) 2 Position double: SYJA3240-M5 10 9 36 7.1 2-M3 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 8.2 7 2.5 (Mounting holes

Magnetically Coupled Rodless Cylinder

18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

EXxx-OMN0037CN

(3) AD F7FFF -3276732767 ()() 15 V 15 V 5000 1000 10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD (ab) [V] [mA] 16 10 010 V 15 V 05 V 020 mA 420 mA FFFE7FFF -3276632767 10 5 5 20 20 F7FFE -3276732766 0 1 0 0 4 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release