EXxx-OMN0037CN

0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

CRBB-OM00004

Size: 10, 15 Size: 20, 30, 40 11 No. Rotating Angle Adjustment Method The rotating angle can be adjusted by moving the stopper blocks (A) and (B) shown in Fig. 1. Fig. 1 shows the default position of the angle adjustment unit. Fig. 1 shows size 20. Make adjustments when pressure is not being applied.

T

Refer to pages 15-18-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. TUH0644 B 20 Length per roll Tubing model Length 20 m roll 100 m roll Symbol 20 100 Caution 1. Please consult with SMC regarding other fluids. Water cannot be used due to the occurrence of hydrolysis.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 5.5 11 H (NN 1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air

Cylinder with Lock Series MNB

65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22 30 30 20 19 37.5 116 20 170 96 1/4 17 26 37 to 750 Bore size (mm) MM J T S U V GF K L Q RR H VA W Z ZZ P GE N 32 M6 x

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model K J M L1 E L2 M H t W1 W2 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 17 6 44 10 11 13 8 10.5 16.5 23.5 55.5 15 15 17 8 14.5 6 14 J Panel thickness (Max. t) 23 30 69 20 21 24 8 20.5 7 17 W2 W1 M 28 35 78.5 24 26 28 8 24.5 7 21 1/4 (E) (E) H 39 43.5 29 100 39 43 9 36.5 9 26 L1 Class 2 to

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

IDG

(Refer to page 14-19-11.)

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Auto Switch Guide

-10 Grommet 10-20-11 Connector 10-20-12 Band 10-20-13 Terminal conduit 10-20-14 10-20-13 DIN terminal 10-20-14 10-20-15 Grommet Rail 10-20-16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector 10-20-17 Reed Switch Solid State Switch Grommet 10-20-18 Tie-rod

EXxx-OMY0006CN

10-11 Bit 7 Ch3/7(3) Table 10-11 58 No.EX##-OMY0006CN 10.7.

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

Vacuum System Peripherals:

Series ZM 13-14-20 4.

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

CQS

25 4 6 10 11 0 3.5 5.5 2 [4.5] 21 24.5 26.5 0 3.5 5.5 19 22.5 24.5 6 10 11 CUJ 1.5 [1] 3.5 [1] 2.5 0.5 7.5 9.5 7.5 9.5 7 7 CU Long Stroke 12 7 17 1 19.5 11 5 9 11 9 7 5 [2.5] 5 CQS 16 6 19 0.5 21.5 10.5 5.5 9.5 10.5 9.5 6 4.5 [2] 5.5 Bore size (mm) 20 11.5 22.5 6 25 16 9 13 16 13 11.5 10 [7.5] 9 CQM 25 13.5 24.5 8 27 18 10 14 18 14 13.5 12 [9.5] 10 Anti-lateral Load Type CQ2 Courtesy of