4-channel Flow Monitor ( compatible)

7 to 110 100 L Flow gal/min 2.6 to 26.4 1.8 to 29.0 PD 100 to 1000 70 to 1100 Flow L/min 50 to 250 20 to 280 250 L Flow cfm 13 to 66 5 to 74 PD 200 to 1000 80 to 1120 Temperature oC 0 to 100 -10 to 110 50 oC Temperature oF 32 to 212 14 to 230 PD 0 to 1000 -100 to 1100 Flow L/min 0.0 to 10.0 0.0 to 10.5 10 L Flow gal/min 0.000 to 0.353 0.000 to 0.370 PD 0 to 1000 0 to 1050 Flow L/min 0.0

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2 position Double Closed center 3/8 Exhaust center 3 position Pressure center Perfect type Series EVS7-10 Flow characteristics 1 4, 2 (P A, B) 4, 2 5, 3 (A, B EA, EB) Bore size Positions C 13 16 13 16 13 15 13 16 13 15 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 Cv 3.0 4.0 3.0 4.0 3.0 3.5 3.0 4.0 3.0 3.8 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.10 Cv 4.0 4.4 4.0 4.4 4.0

NCA1

-93 NCA325-13-Q6311 5008-131 10 Tie Rod Nut Carbon steel NCA150-13-Q6308 5008-93 11 Retaining Ring Carbon steel NCA150-31-Q6308 NCA150-31-Q6308 NCA325-31-Q6311 12 Rod Seal Retainer Resin NCA150-31-Q6308 13* Cushion Seal NBR Available only as an Assembled Item.

PC Wiring System Series PCW

4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 100 3 5 10 20 50 100 1 2 3 4 5 10 20 30 30 100 200 40 50 MY1B m1,m2,m3 max. m1,m2,m3 max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8 42.1 56.7 49.2 56.7 49.2 49.6 24 49.6 42.1 24.5 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Cylinder bore size (mm) 6 Above nos. 13 & 15 (2 pcs. ea.), 14 (1 set) MXP6-PS MXPJ6 No.

Stainless Steel One-touch Fittings Series KG

M5 Nylon Urethane KGT04-M5 KGT04-01 . 15.5 M5 0.8 14 22 15.5 23 13 3.5 4.3 4.3 7 9.5 1 8 4 13 M5 0.8 14 10 10 18 10.4 6.0 6.0 16 1 4 KGT04-02 26 25 19 4.2 13 KGT06-M5 KGT06-01 15 23 17.5 14 25.5 4.3 4.3 16 11.5 7 . 1 8 10 6 10 20 12.8 1 4 KGT06-02 27 27.5 17 17 14 13.9 13.9 21 3 8 KGT06-03 29 29 35 1 8 1 4 KGT08-01 KGT08-02 24.5 28.5 28 30 12 15 23 R(PT) 8 14 18.5 26.3 15.2 18.2 12 23 3 8

Series KG Stainless Steel One-touch Fittings

M5 Nylon Urethane KGT04-M5 KGT04-01 . 15.5 M5 0.8 14 22 15.5 23 13 3.5 4.3 4.3 7 9.5 1 8 4 13 M5 0.8 14 10 10 18 10.4 6.0 6.0 16 1 4 KGT04-02 26 25 19 4.2 13 KGT06-M5 KGT06-01 15 23 17.5 14 25.5 16 4.3 4.3 11.5 7 . 1 8 10 6 10 20 12.8 1 4 KGT06-02 27 27.5 17 17 14 13.9 13.9 21 3 8 KGT06-03 29 29 35 1 8 1 4 KGT08-01 KGT08-02 24.5 28.5 28 30 12 15 23 R(PT) 8 14 15.2 18.5 26.3 18.2 12 23 3 8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

NCA1

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Air Cylinder NCA1 Series

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

EXxx-OMY0006CN

EX245-DX1EX245-DY1 EX600-ZT1 1 88 EX600-ZT1 Fig. 13-1 EX600-ZT1 80 No.EX##-OMY0006CN 13.2. Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

CRQ2

The rotation angle can be adjusted between 0 to 100. The rotation angle can be adjusted between 0 to 100.

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

CXS

m (kg) Overhang l (mm) 25 Graph (9) Up to 50 st 0.1 20 0.05 V = Up to 100 mm/s V = Up to 300 mm/s 0.05 0.04 15 10 0.03 0 0.01 Weight m (kg) 20 40 60 80 100 Overhang l (mm) 0.02 Graph (12) V = Up to 400 mm/s; Up to 30 st 2 CXSM CXSL 1 CXSL6 CXSM6 0 0.01 20 40 60 80 100 Weight m (kg) Overhang l (mm) 32 25 0.1 20 0.05 15 10 0 0.01 20 40 60 80 100 Overhang l (mm) 8-28-13 13 Series CXS Horizontal

7

CKGA80, 100/CKPA80, 100/With Magnetic Field Resistant Auto Switch (Rod Mounting Type) 1 P3DWASC CK G A 80 Y Built-in standard magnet type with magnetic field resistant auto switch 100 Built-in strong magnet type with magnetic field resistant auto switch 100 P79WSE CK P A 80 Y Built-in standard magnet Number of auto switches Nil S 2 pcs. 1 pc.

LEF-OM002xx

graph> Horizontal Transfer LEFS16A LEFS25A 12 B 20 B A 10 W(kg) A H W(kg) 15 8 6 10 4 5 2 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 900 V (mm/s) V (mm/s) Vertical Transfer LEFS16A LEFS25A 12 B 20 B 10 A A H W(kg) W(kg) 8 15 6 10 4 5 2 0 0 100 200 300 400 500 600 700 800 900 0 V(mm/s) 0 100 200 300 400 500 600 700 800 900 V (mm/s) 13 - 2.2 Slider type LEF Series /