Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Possible to transfer a workpiece at low-speed.

67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 10 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10

MLGP

D200 200 100 -X 100 100 100 100 80 2080 80 63 Data 63 63 50 40 50 Load weight m (kg) Load weight m (kg) 50 40 40 32 10 10 32 32 1 10 100 50 50 200 1 5 100 10 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-13 13 Series MLGP Vertical Downward Mounting (Ball bushing bearing) Operating pressure: 0.4 MPa MLGPL20/25 (21) 30 Stroke or Less V = 400 mm/s (22) Over 30 Stroke V = 400

MLGP

M6 x 1.0 M8 x 1.25 A, DB, E Dimensions: MLGPL (Ball bushing bearing) A, DB, E Dimensions: MLGPM (Slide bearing) A E A E Bore size (mm) 79.5 84 128.5 Bore size (mm) DB DB st 50 50 < st 200 200 < st 12 16 20 st 50 50 < st 200 200 < st st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 10 13 16 st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 51 51 58.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.

100

z on page 13 for replacement parts. 16 Vacuum pressure switch Refer to x on page 13 for replacement parts. 17 Adapter assembly for bottom mounting Brass (Electroless nickel plating) Refer to 0 on page 14 for replacement parts.

MQQ

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

VP4

Series 50-VFE Series 50-VPE 3-6-13

IDG

, 30H, 50H Standard dew point 20C In the case of 15C (symbol H) type (but, except IDG30, 50, 30H, 50H) Step 6 Confirmation of pressure drop P1 [MPa] Single unit (Refer to pages 14-19-12 and 13.)

CJ2

(mm) MM NA NN S T Z Bore FZ FY FX FT D FC FB F A H GA 6 15 M3 X 0.5 16 M6 X 1.0 61 (66) 3 117 (122) 32 14 24 1.6 3 4.5 13 8 14.5 28 10 16 15 12.5 49 8 M4 X 0.7 32 14 24 1.6 4 4.5 13 8 28 12.5 M8 X 1.0 105 50 8 M5 X 0.8 42 20 33 2.3 5 5.5 19 8 15 28 M10 X 1.0 106 ( ) in S or Z dimensions: With auto switch With air cushion Dimensions not mentioned in the below table are the same as the above

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150

MY1

63 087 100 212 245 17 19 10.5 12.5 41.5 47.0 27.0 29.5 25.0 27.5 37.5 39.5 12 15 124 149 83.5 M14 x 2 M16 x 2 28 32 250 290 11 14 57 65 168 200 15 16 M8 x 1.25 47 50 44 60 122 147 105 M10 x 1.5 PA NH NW PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 50 63 090 110 60 70 118 142 120 140 186 220 10 12 26 42 380 436 28 30 35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490

Thermo-chiller

) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55/68 L/min) Maximum pump head 164 ft (50 m) Minimum operating ow rate 50/60 Hz Note 7) 7.4 to 11.0 gal/min

Plug-in Unit

L L (60) 44 8 16 14 25 1 13 47.04 50 " 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no. (arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Magnetically Coupled Rodless Cylinder

W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs

CEx-OMQ0011

50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4