V

/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !

Compact and Lightweight

13 One-touch One-touch One-touch 11 N03 13 One-touch Screw-in One-touch N03 N03 N03 Screw-in Screw-in Screw-in ZH20DA10 12 12 One-touch One-touch One-touch 10 04 12 One-touch Screw-in One-touch 03 04 04 Screw-in Screw-in Screw-in ZH20DA11 13 13 One-touch One-touch One-touch 11 N04 13 One-touch Screw-in One-touch N03 N04 N04 Screw-in Screw-in Screw-in 4 Screw-in: NPT female

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

HRX-OM-Y098

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to the table below for sockets. n 55+50(n2) n=2, 3, 4, 80+50(n2) n=2, 4, 6, 8, 75+50(n2) n=2, 4, 6, 8, 90+50(n2) n=2, 4, 6, 8, Same side Bore size (mm) Width across flats 10 80 90 1 75 Nut Socket JIS B1181 3rd class intermediateM8 X 1.25 JIS B4636 + Twoangle socket13 40/50 13 JIS B1181 3rd class intermediateM10 X 1.25 JIS B4636 + Twoangle socket17 63 17 JIS B1181 3rd class intermediateM12

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 8-30-

Brake mechanism added

11 D-G5/K59/G5W D-K59W/G5BA D-G5NT/G59F D-G39/K39 D-G39C/K39C D-A5/A6 5 6 6.5 6.5 7 D-B5/B64 D-A59W 13 13 14 15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 8-30-

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 8-30-

energy saving effect

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

Series KV2 Fittings

Color Caps KQ2C-_ _[ _ _ ] L ID OD Code Color R YR BR Y G CB W B GR BU Red Orange Brown Yellow Green Sky Blue White Black Grey Blue Applicable Tube OD (Inch) Part Number ID L Bag/Box Quantity OD 5/32 1/4 3/8 1/2 5/8 KQ2C-04[ ] KQ2C-07[ ] KQ2C-11[ ] KQ2C-13[ ] KQ2C-16[ ] 10.5 12.6 16.6 20.6 26.3 7.0 7.5 10.7 13.9 17.2 2.7 2.9 3.1 3.1 3.9 50/500 50/500 50/500 50/500 50/500 Fitting Boots KR-

Vacuum Pad

K: Non-rotating D-D B B Width across flats 19 Width across flats 19 D D D D 22 28 A B 50 5 5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

(mm) A B B1 B2 D F FD FT FX FY FZ GA GB H H1 H2 I K MM N NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 to 800 18 38 13 26 10 16 7 6 51 21 68 12 8 41 5 8 30 5 M8 x 1.25 13 26 15.5 23 f8 25 to 800 22 44 17 32 12 16 7 9 53 27 70 12 8 46 6 8 32 5.5 M10 x 1.25 13 28 19.5 25 f8 32 to 800 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 31 f8 40 to 800 24 60

Solid State Auto Switches

40 40 45 50 45 63 45 80 45 100 Mountable models 50 Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).

HRX-OM-W060

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

XL

123 48 40 26 6.5 12 12 54.5 58.5 73.2 83.6 41 52 70 83 95 110 55 75 87 114 66 79 100 117 170 183 217 256 65 70 88 90 14 16.5 18.5 25.5 XLDV-40 XLDV-50 XLDV-63 XLDV-80 13 13 25 Series XLH Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 13 Series VQZ How To Order Manifold Connector Kit Preferred Option Program How To Order: VQZ100 Base Mounted Manifold VV3QZ 1 5 08 N7T C Option Series None DIN rail mounting (DIN rail standard length) External pilot 1 VQZ100 D R Manifold type 5 Base mounted Kit C Connector Number

High Vacuum Angle Valve, XL Series

123 48 40 26 6.5 12 12 54.5 58.5 73.2 83.6 41 52 70 83 95 110 55 75 87 114 66 79 100 117 170 183 217 256 65 70 88 90 14 16.5 18.5 25.5 XLDV-40 XLDV-50 XLDV-63 XLDV-80 13 13 25 Series XLH Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.