Compact 400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]
2000 100 2000 100 2000 LEHS LEHS10 LEHS20 LEHS32 LEHS40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700 40 700 8 35 800 45 800 45 800 50 800 9 40
63 B10 63 M10 x 1.5 80 B12 80 M12 x 1.75 100 100 125 125 B01 Vacuum entry Pad type Rc 1/8 HB Large bellows pad Material N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-91 10 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4
speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000
122 138 M 10 13 13 MM MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 Bore size (mm) 25 32 40 09 11 14 09.5 16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16
(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.
01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification
Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.
200 300 500 700 Average speed Va mm/s A, A Stroke (mm) A A A A 20 14.5 16.5 21 27 29.5 35.5 Model 150 56.5 64 125 42.5 55 64 100 34 42.5 53.5 50 75 28.5 34 33 37.5 43 50 18.5 28 25 30 33.5 43 40 18.5 20.5 25 27 29.5 35.5 30 14.5 18.5 21 27 29.5 35.5 10 14.5 16.5 21 27 29.5 35.5 Allowable moment coefficient: Graph 2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 6 7 9 10.5 14 16.5 13.5 16 19.5 24.5
Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Bore sizes 80, 100 added. Port thread types NPT, G added.
500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100
For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min
16 18.5 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 99 54 10 18.5 AS3001F-12-3 76 11 34.9 63.7 58.3 22 AS3001F-07-3 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 100 84 12 20.9 AS4001F-10-3 77.7 AS3001F-09-3 82.1 11.3 35 69.3 61 21 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 64.4 8.2 167 88 18.5 16 10 18.5 27 21 24.5 3.5 AS4001F-12-3 36 70.3 62 22 AS3001F-11
100 200 1 0.5 30 0.5 0.8 Provide requisite conditions for selection.
Refer to page 21 for detailed specifications. Auto switch type Part no.
20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body
Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to
Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b
Refer to page 21 for detailed specifications. Auto switch type Part no.
100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.