Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

to 750 50 55 70 80 100 120 C95 FT FX ZZ + Stroke FZ CA1 CS1 Single clevis/(C) Port Cushion valve Single clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX 0.1 ZZ Z U RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30

Electric Actuator Triple Axis P&P Unit

3) For motor details, please refer to Applicable motors on page 23. 4) When the cover needs to be removed such as in the case of belt maintenance, secure work space of 40 mm or more. 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13 Electric Actuator

Rotary Table

Recommended models Size Solenoid valve (CV value) Speed controller Tubing 10 4 / 6 20 30 50 70 0.15 to 0.2 AS2000 series 0.2 to 1.0 6 / 8 100 200 22 - Mounting Load restrictions Set the load and moment to be applied to the table within the allowable values shown in the table below.

Modular F.R.L. Units

50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

212

22 80 120 189 C F E Breathing port M5 x 0.8 J Integral ttings/LQ1 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-V07(06) 40 40 49.3 68 20.1 LVR40-V11(10) 82.5 82.5 89 115 33 LVR40-V13(12) 82.5 82.5 89 115 33 LVR50-V19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-V07(06) 8 27 56 77 LVR40-V11(10) 14 64.5 100 140.5 LVR40-V13(12) 14 64.5 100

Micro Mechanical Valve Series VM1000

32 16 30 25 2 x 1/4 2 x 5.5 mounting hole 40 * 0.5 MPa supply F .O.F .* 52 N T.T. 5.8 mm 22 Series VM100/200 Specific Product Precautions 1 Be sure to read before handling.

HRX-OM-M090

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-R016

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10

Plate Cylinder with Lock Series MLU

FT FZ FX 2-FD Rear flange FY FV FT FZ FX ZZ + Stroke Single clevis Double clevis CDH10 Q + Stroke CX CX -0.2 -0.4 +0.4 +0.2 L Z + Stroke RR -0.1 -0.3 CZ ZZ + Stroke (mm) CX CZ 17 22 27 32 Q RR 143 162 176 209.5 Z ZZ L CDH10 9 11 13 16 Rotation angle Model MLUC25, MLUD25 MLUC32, MLUD32 MLUC40, MLUD40 MLUC50, MLUD50 18 22 26 32 160 184 203 241.5 8 10 10 14 151 172 186 223.5 100 90 80 80 8

NCQ8

(1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 0.76 0.67 1.42 1.33 2.50 2.47 056 (9/16") 3.06 075 (3/4") 3.42 106 (1-1/16") 3.73 Single Acting, Spring Extend Unit: lbs

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

ZPT/ZPX

121 12 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 +7 +228 22 How to Order ZPT 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) 40 50 63 80 100 125 M18 x 1.5 (40 to 80) 40 A18 50 M22 x 1.5 (100, 125) A22 63 80 Vacuum entry 100 B01 Rc 1/8 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 50 75 100 Large bellows pad N S U F E NBR Spring

Vacuum Unit

V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 r Connector (Supply valve/Release valve/Pressure switch for vacuum) For supply valve/release valve: 300 mm (Connector assembly)4 For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

2 Different sides Same side 110 110 150 150 -XC15 Change of tie-rod length D-A3 D-G39 D-K39 -XC18 NPT finish piping port 150 + 100 (n 2) n = 2, 4, 6, 8 Different sides 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 n Double clevis pin and double knuckle pin made of stainless steel -XC27 150 + 30 (n 2) n = 2, 4, 6, 8 Same side 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 1 15 35 55 110

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..