Precision Cylinder Series MTS 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8
Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4
32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact
500 (3000) 20 2.7 OUT Black 3.2 DC () Blue 2.6 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV OUT (+) Brown Precautions Be sure to read before handling.
Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.
(Figure 20) (3) Hold the piston in place and install the pinion gear on the piston. Figure 21 shows the piston position and Figure 22 shows the pinion gear assembly angle. Fig. 20 Fig. 21 Size 10 Size 20305070100200 Fig. 22 Piston assembly Push nut side 40 - (4) Install the bearing, bearing holder and table on the body.
L-bracket 2.3 30 36 52 40 22 Straight type 3 m Cable connector TM-4DSX3HG4 50 Right angle type 3 m 4 x 5.5 8 x 4.5 4 x 7 22 TM-4DLX3HG4 50 36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 14-8-15 16 Series ITV1000/2000/3000 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.
None 9 22 SOL.B 18 () (+) Gray None 5 stations 10 .
Series VXR21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)
0.8 Width across flats 14 17.5 21.5 5 2 5 17 21 20 3 25 3 1.6 ZP3P-T35PTSF-B8 [Weight: 13.2 g] ZP3P-T50PTSF-B8 [Weight: 20.9 g] M8 x 1.25 Width across flats 21 M8 x 1.25 Width across flats 21 8 8 3 22 28 19 25 35 4 50 4 4.5 5 Vertical Vacuum Inlet, With Buffer ZP3P Series How to Order Vertical vacuum inlet With buffer ZP3P 20 J 10 PT T SF B5 Pad diameter Symbol Pad diameter 20 20 25 25 35
cable are included. 2) Sensors must be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 11 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31
D-M9V D-M9MV D-M9AV D-A9V Hs Hs Auto switch Auto switch 16.5 16.5 A B A B 22 20 (22) ( ): Dimension of the D-M9AV A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.
For details, refer to pages 3-7-19 and 3-7-20.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.
(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5
23 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference
34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 10 10 12 12 12 14 14 14 14 14 14 14 17 17 17 22 22 26 26 4 4 6 6 6 8 8 10 10 10 10 10 12 12 12 16 16 20 20 1 1.5 1 1.5 2 1.5 2 2.5 3 3.5 4 6 3.5 4 6 4 6 4 6 D H2 H1 M L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection thread L1 A Width across flats H1
28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39 45.5 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 36.5 133 (150) 20 25.5 41.5 49.5 ( ): N.O. 17-3-40 9 Series VXD21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Water and Oil The VX series will be revised shortly.