SMC Corporation of America
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Installation at indoor site 1 In case of facility having a large installation area (that can vent the air naturally) Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2 In case of facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air

N2 gas Packaging Clean gas filter Class 10,000 Class 10,000 Features 1 Precision Clean Regulator Series SRP How to Order SRP 1 R 1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with

N2 gas Packaging Clean gas filter Class 10,000 Class 10,000 Features 1 Precision Clean Regulator Series SRP How to Order SRP 1 R 1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with

(c)When a sensor is not connected.

When very clean air is required, install a separator as mentioned above on the downstream side, or instead of a regulator, use the order made specification (refer to page 35) fitted with a micro mist separator regulator (series AWD). 3.

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Select the point of contact A of inlet pressure and max. air capacity in the graph. 2. AMD650 is obtained when the max. flow line is above the point of intersection A in the graph. Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point.

Because tube fittings are provided, use a tube with a bore of 10mm, and keep the overall pipe length within 5m. AMH850 type (N.O) Use a tube with a bore of 9mm or more, and keep the overall pipe length within 2.8m.

GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 14 5.5 B1 A1 17.7 5 6 2 1 18 B6 A6 6.3 16 15 L 11 30.7 63 No.JXC-OMU0004-A 11.3 [5m ] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 S 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 8 14.2 B1 A1 17.7 2 1 14 18

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

For futhr details ol accessorbs. reler lo 'accessorles' on page 6. 4 rP300 METHOD OF OPERATION Signal pressure from a controlled pressure source enters the 1P300 input chamber and exerts a force on the diaphragms. A pressure differential between the two diaphragms creates a force to open the pilot valve.

For futhr details ol accessorbs. reler lo 'accessorles' on page 6. 4 rP300 METHOD OF OPERATION Signal pressure from a controlled pressure source enters the 1P300 input chamber and exerts a force on the diaphragms. A pressure differential between the two diaphragms creates a force to open the pilot valve.

/ ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -13No.PF-OMM0004-D F.S.( 1~5V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04

Series IR Precision Regulators are designed to be compact and light weight. The maximum set pressure has been expanded from the conventional 0.7MPa to 0.8MPa. Relief flow has been increased by nearly 5 times (compared to SMC IR201, IR401). The optio, PRECISION REGULATOR, PERCISION REGULATOR, O32, 0.14 lb

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range Nil F For vacuum pressure For compound pressure Nil None Bracket A (ZS-24-A) 10.0 to 101.3kPa 100.0 to 100.0kPa A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8

22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range For vacuum pressure For compound pressure None Bracket A (ZS-24-A) Nil 10.0 to 101.3kPa 100.0 to 100.0kPa Nil F A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8