F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Guide Cylinder/Compact Type Series MGC

32 135 35 60 80 50 32 75, 100, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 M6 x 1 1/8 21 12 38 16 112 53

21

53 77 114.5 125 Use a thin wrench when tightening the piston rod.

0.4

D E Note) DIN rail mounting style Direct mounting style Option Nil 02 to 16 (1) B (2) K (3) N R S None DIN rail length specified Back pressure check valve Note) Refer to page 53 for details.

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

KR

22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 30 30 Reference dimensions after R thread installation. 15.5 17 1 4 17 10.4 14 27 21 19 26 19 14 17 6 5.6 Applicable tubing 3 8 1 8 KRH06-03S 24 26.1 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 14 1 4 3 8 1 8 1 4 3 8 20.5 15.5 26 27.5 22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53

Table of Contents

Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to pages 17-5-53 through 17-5-55 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

SQ1000/2000

External pilot specification Note) Enter "-BR" for both specifications. 53 Series SQ1000/2000 3. Connection method (Refer to page 52 regarding the procedures for adding stations to a manifold block.)

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the C4, C6. 3 68 59 70 61 66 57 6 116 107 121 112 114 105 8 148 139 155 146 146 137 10 180 171 189 180 178 169 2 52 43 53 44 50 41 20 340 331 359 350 338 329 4 84 75 87 78 82 73 5 100 91 104 95 98 89 7 132 123 138 129 130 121 9 164 155 172 163 162 153 11 196 187 206 197 194 185 12 212 203 223 214 210 201 13 228 219 240 231 226 217 14 244 235

VM

Push Button (Mushroom) Push Button (Extended) Push Button (Flush) Twist Selector (2 position) Key Selector (2 position) Twist Selector (3 position) Foot Pedal Push-Pull P3.5-7 P.3.5-11 P3.5-19 Effective Area (Cv) Number of Ports 1 (0.055) 2, 3 Poppet 2.5 (0.14) 2, 3 19 (1) 2, 3 Poppet Poppet Function 3.5-1 Series VM Mechanical Valve SlA VlA VM400 VZM500 VZM400 VFM300 VFM200 VM800 21 X 35 X 53

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) L n Equation L1=16n+53, L2=16n+73 n: Station (Max. 24) 24 437 457 487.5 498 23 421 441 462.5 473 22 405 425 450 460.5 21 389 409 437.5 448 20 373 393 412.5 423 19 357 377 400 410.5 18 341 361 387.5 398 17 325 345 375 385.5 16 309 329 350 360.5 15 293 313 337.5 348 14 277 297 325

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) Soft PBT (UL94 V0) PA66 (UL94 V0) TPU (UL94 HB) Material Material of sheath (Sheath color) PUR (Purple (RAL 4001 equivalent)) PVC (Light blue) Weight Approx. 308 g Approx. 306 g 1 m: Approx. 100 g 5 m: Approx. 355 g Approx. 47 g Approx. 53

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

5 Port Solenoid Valve

EX500 series Page 41 Page 35 Page 33 Page 37 Plug Lead Manifold Bar Base 6 7 14 15 0 1 8 9 Page 83 1 F kit D-sub Connector P kit Flat Ribbon Cable J kit PCWiring System Compatible Flat Ribbon Cable T kit Terminal Block Box L kit LeadWire M kit Circular Connector C kit Connector 26 pins, 20 pins MIL Standard MIL Standard MIL Standard 20 pins Page 15 Page 19 Page 23 Page 45 Page 49 Page 53

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.