5 Port Solenoid Valve

EX500 series Page 41 Page 35 Page 33 Page 37 Plug Lead Manifold Bar Base 6 7 14 15 0 1 8 9 Page 83 1 F kit D-sub Connector P kit Flat Ribbon Cable J kit PCWiring System Compatible Flat Ribbon Cable T kit Terminal Block Box L kit LeadWire M kit Circular Connector C kit Connector 26 pins, 20 pins MIL Standard MIL Standard MIL Standard 20 pins Page 15 Page 19 Page 23 Page 45 Page 49 Page 53

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Mechanically Jointed Rodless Cylinders

Refer to front matter 6 for details. 22 Mechanically Jointed Rodless Cylinders Series MY3M Side Support Side support A MY-SA 2 x G E F 2 x H B A D C Side support B MY-SB 2 x J E B A C D (mm) B C 15 25 35 G 6.5 8 9.5 H 3.4 4.5 5.5 J M4 x 0.7 M5 x 0.8 M6 x 1 D 26 38 50 E 4.9 6.4 8 F 3 4 5 A 53 65 77 97 112 138 160 Model Applicable cylinder MY3A16MY3B16 MY3A20MY3B20 MY3A25MY3B25 MY3A32MY3B32

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCHIS10M-20-D to IS10M-60-D Model IS10M-20-D IS10M-30-D IS10M-40-D IS10M-50-D IS10M-60-D A B C D 28 77.6 60.1 42 31 85.6 64.1 53 39 93.6 68.1 71 47 96.6 69.6 71 62 106.6 74.6 90 11-2.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 24 Series SYJ500 Type

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

Modular Type Lubricator Series AL

70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 53 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 F W X10 NA 1 G Cable entry direction Top entry Cable entry direction Power supply voltage Switch Motor specification Matsushita Electric Industrial Co., Ltd.

One-touch Fittings Series KQ2

D L M Weight (g) A Nylon Urethane M5 0.8 12.7 3.4 2.9 KQ2H23-M5 KQ2H23-01S KQ2H23-02S KQ2H04-M5 KQ2H04-M6 KQ2H04-01S KQ2H04-02S KQ2H06-M5 KQ2H06-M6 KQ2H06-01S KQ2H06-02S KQ2H06-03S KQ2H08-01S KQ2H08-02S KQ2H08-03S KQ2H10-01S KQ2H10-02S KQ2H10-03S KQ2H10-04S KQ2H12-02S KQ2H12-03S KQ2H12-04S KQ2H16-03S KQ2H16-04S 2 9 16 2.4 2.5 9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

mlu

67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

IZx-OMT0049

Note 53) Press S button once Press S button once [Channel selection mode] Note 53) In Channel selection mode, frequency set mode, or offset voltage adjustment mode, the selected bar (high voltage power supply module) moves on to the ion generation stop mode by pressing and button simultaneously for 2 s or longer and stops the ion generation.

Electromagnetic Digital Flow Switch

6 1.6 115 106 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 * If you are installing directly, choose a self-tapping screw with a screw-in depth of 8 mm.

Integrated Controller

Integrated Controller Slider Type EQFSH Series p. 8 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 9 How to Order p. 17 Specifications p. 18 Construction p. 20 Dimensions p. 21 Rod Type EQYH Series p. 36 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

35.5 59.6 [66.6] Approx. 300 (Lead wire length) 62.8 [65] 53 [55.2] 61.9 54.5 Refer to page 646 for dimensions with connector cable.

Speed Controller with Indicator

7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-06 (S) 6 11.2 19 33.8 21.4 43.9 14.2 26 AS231FS1-02-08 (S) 8 13.2 34.9 23.5 46 15.6 27 AS231FS1-02-10 (S) 10 15.9 20.9 38.1 24.7 47.3 17 28 AS331FS1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 21.5 16.2 49 AS331FS1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FS1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53

0.4

side U side n Stations 8 7 6 5 4 3 2 1 VQ7 C10 [3(R) EXH port] C10: 10 One-touch fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR ZY 125 145 166 137 157 195 202 222 243 214 251 272 489 529 574 613 553 593 638 677 40 50 63 80 100 125 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.