MU

+ Stroke Rotation range () 100 90 80 80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 ZZ + Stroke 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis

MU

+ Stroke Rotation range () 100 90 80 80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 ZZ + Stroke 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Clevis pin and snap ring are shipped together with double clevis

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

VXD21/22/23

G, C T 1 4 3 8 1 2 3 4 S Note) S L, Z S L, Z PB Thread AC 1 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

Compact Cylinder with Air Cushion

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Carbon steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

28 40 40 60 60 U CX L CZ Z + Stroke RR ZZ + Stroke Center trunnion/(T) Z+1/2 Stroke Center trunnion Port Cushion valve (mm) Bore size (mm) Stroke range TX TZ Z TT TDe8 TY TDe8 32 40 50 63 80 100 50 63 75 90 110 132 74 95 107 130 150 182 89 93 105 105 129 129 17 22 22 28 34 40 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 12 16 16 20 20 25 49 58 71 87 110 136 TY TX TZ TT 1.7

3 Port Solenoid Valve Metal Seal Series VZ200 1

-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

180

7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

RHC

7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they

RQ

Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Carbon steel Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

5 Port Solenoid Valve SY Series

Power saving circuit is only available in the "Z" type.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

HRX-OM-M090

HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20

Rotary Cylinder Series MRQ Size: 32, 40 1

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

MHF2

L L H Holding point Holding point H MHF2-12D MHF2-8D 80 50 Pressure 0.2MPa 40 60 0.5MPa 0.5MPa Pressure 0.2MPa 0.6MPa 0.6MPa Overhang Hmm Overhang Hmm 0.7MPa 30 0.7MPa 0.3MPa 0.3MPa 40 0.4MPa 0.4MPa 20 20 10 40 20 80 60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang

MHF2

60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 80 60 40 20 0 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers

MU

80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 A clevis pin and snap ring are packed with the double clevis style.