Pilot Operated A, B, G, H, J, L) (Nil, A, B, G, H, J, L) 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V (D, E, N, P) Note) VXD2130 AC VXD21 4 5 Model VXD22 6 7 VXD23 8 9 DC specification is not available.
Application 0 1 2 size Symbol IR1000 IR2000 IR3000 Made to Order Specifications (Refer to page 560) 01 02 03 04 1/8 1/4 3/8 1/2 Note) Air operated type is model IR3120 only.
VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9
) Applicable tube O.D.: 6 13.3 24 16.2 34 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 2n1-M5 x 0.8 (A, B ports) (L4) L3 (3.2) 101.2 U Side D Side 8 3.1 18 28.8
01 Connection Rc(PT) 1/4 02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G(PF) 1/2 F04 Series IR1000 Modular Products
) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L
7 6 5 4 8 4 ON OFF (RXn1) 18 (RX(n 2) 2 RX(n 2)9 ) 0 4 4 8 ON OFF ( 1 ) ( 1 ) ( 1 ) PC35 PC35 PC35 PC35 P A 1 1 PA12 P A 11 PA1 2 P A 1 1 PA12 1.
pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)
1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.
Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.
Rc 1/8, 1/4 300 (Lead wire length) EVS VFN ( ): Rc 1/8 01 02 01 02 01 02 01 02 3 position double check: VZS3650-FZ01 02 2 position double: VZS3250-FZ3 position closed center: VZS3350-FZ3 position exhaust center: VZS3450-FZ3 position pressure center: VZS3550-FZ149.5 (3 position: 157) 300 (Lead wire length) 300 (Lead wire length) Other dimensions are the same as the single type.
Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.
-10AS G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.
gasket positioning) 1/8 (EA, EB port) 3 position closed center/exhaust center/pressure center SYA7 20C8, N9 C10, N11 3 4 5 1/8 (Pilot port) One-touch fitting (A, B port) 2 4.2 (For manifold mounting) Applicable tubing O.D.: 8, 5/16" 10, 3/8" SYA7 20-02 3 4 5 1/4 (A, B port) Manual override (Non-locking) 1/4 (P port) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning
4 A 4 A 4 A 4 A 4 A 4 15.7 11.5 (6.5) 21.5 M12 1/8" PE port 1/8" External pilot port 27 31 38.7 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port P = 25 65.5 Note) The dimensions of the bottom ported type are common to all S kits.
VV317-02-051-02-A Valve stations A port size (Base piping) 1/4 Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs. PVT317-53-1A 1 pc.