Thermo-chiller/Rack Mount Type

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

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Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping H Center of piping Center of piping Standard

HRL

Heat quantity by cooled substance (per unit time) Q : Unknown [W] ([J/s]) Cooled substance : Water Cooled substance mass m : (= x V) [kg] Cooled substance density : 1 [kg/L] Cooled substance total volume V : 250 [L] Cooled substance specific heat C : 4.186 x 103 [J/(kgK)] Cooled substance temperature when cooling begins T0 : 305 [K] (32 [C]) Cooled substance temperature after t hour Tt

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

(N) CXS 1 mm or less Non-locking style, Locking style Back rush Manual release CXT Allowable Kinetic Energy MX 20 25 32 40 Bore size (mm) Allowable kinetic energy (J) Rubber bumper MXU 0.27 0.4 0.65 12 Effective cushion length(mm) 11.0 11.0 11.0 11.8 MXS Air cushion Cushion sectional area(cm2) 2.09 3.30 5.86 9.08 MXQ Absorbable kinetic energy J 0.54 0.78 1.27 2.35 MXF Standard Stroke Long

AMG

Applicable model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Bracket assembly With cap bolt With spring washer BM51 BM52 BM53 BM54 BM55 BM56 BM57 Condition of inlet air Pressure: 0.7MPa Temperature: 25C Relative humidity: 100% How to Order AMG 250 03 J B Liquid water content (Water droplet content): 1.5g/m3 (ANR) Options Body size Compressed air flow: Rated flow of each model J Drain

PFxx-OMO0004CN

B AC (83) C A B -16No.PF-OMO0004CN-E 0.450.55 Nm ,, (ZS-33-M) (ZS-33-MS) M34 (84) M3 M3 -17No.PF-OMO0004CN-E M3(2) 0.350.45 Nm (84) M3 DIN DINDIN DIN0.350.45 Nm () DIN DIN F02(G/14)DIN DIN -18No.PF-OMO0004CN-E IN8cm 2F.S.

Size: 1 (M3, M5 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: M3 (M3 x 0.5), Option: None, Lock Nut: J (Round)

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A Mounting screw (M3 x 8L) (Accessory) Waterproof seal (Accessory) Option 2 Panel mount adapter Nil None Panel Sensor connector (4 pcs.) Front protection cover + Panel mount adapter 4C B Connector Mounting screw (M3 x 8L) (Accessory) Front protection cover Connector is not connected, but shipped together. This connector cannot be used with the PSE570 series.

ZSE5/ISE5

Jf Sl.W') GNOI~1 : ~EDiM,> I OIlC\ ~SlW< ::HJ1eIma ~ __ _ ___ J !... ___ _ _ J !... _ _ __ J Precautions Construction/ Parts List Piping (DBe sure to apply a wrench to the metal seclion (17mm) during piping. Never apply a wrench to the resin section of the main unit. , ::g}Clean tube fittings by air-blow (0 remove foreign matter from inside.

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Fittin Model D SE6B-B2-(J NOle 2 types of output specifications; 2 output type (either NPN or PNP) 1 and analog output type Port size URJ X(o/1618UNF) TSJ ~e/ H;-20UNF) With 4 peS. M3 screws Note 1} Union ring JOl!1t (URJ) for use wllh VCR,g:,Iype fittings.

LEF-OM006xx

40 50 60 70 80 90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1

VM

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Air Cylinder CLA Series Fine Lock Model

14.224 Vof ume alm 14.7 mm3 6.'10 x 10-5 in3 cm3 (cc) 0.0610 in3 Energy m3 35.320 fts N. m 0.7375 L 0.0353 ft3 J 0.7375 L 0.2642 gal (U.S.) MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

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14.224 Vof ume alm 14.7 mm3 6.'10 x 10-5 in3 cm3 (cc) 0.0610 in3 Energy m3 35.320 fts N. m 0.7375 L 0.0353 ft3 J 0.7375 L 0.2642 gal (U.S.) MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up