Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

0.4

(Not applicable to Gateway unit) VQ7 Connector type manifold Connector wiring diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin

VQ5000

(Except double wiring) Name plate Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure Nil CD1 (2) CD2 (2) CU1 (2) CU2 (2) K (4) N SD (2) SU (2) W 5 VQ5000 D U D side mounting U side mounting Manifold 1 Plug-in unit Stations 02 2 stations Cylinder port 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed 12 12 stations Note 1)

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

Plug-in Unit

Negative COM. 2-2-50 Base Mounted Series VQC Plug-in Unit VV5QC41 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 2-G 3/4 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 77.5 45.5 42.7 15.7 72 SQ 12 20.5 43.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 35 11.5 2-Rc 1/8 (Pilot EXH port) 2-Rc 1/8 (External pilot port) (6.5) 21.5 27 31 38.7 VQ4 VQ5 2n-Rc 1/4, 3/8, C8, C10

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R016

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Kit How To Order: VQZ200/300 Body Ported Manifold Preferred Option Program VV3QZ 2 2 08 00T C Series DIN rail mount D None DIN rail mounting (DIN rail standard length) 2 3 VQZ200 VQZ300 Kit C Connector Number of stations 02 2 stations 20 20 stations How To Order: VQZ200/300 Body Ported Valve For Manifolding N7T VQZ 1 2 2 5 L Series Port size {2(A) port} 2 3 VQZ200 Body width 15mm VQZ300

Microspeed Cylinder

(built-in magnet) Nil S 2 pcs. 1 pc.

Lubrication Equipment

ALF400 ALT-9 1.17-11 Auto Feed Lube ALF400 to 900 Operating pressure range Tank and line pressure How to Order Auto Feed Lube ALF 40 02 0 Option Auto Feed Lube Port size Symbol Description Applicable model W/ bracket ALF400 to 600 B 02 03 04 06 10 12 14 20 4 1 Body size 8 3 AC 40 50 60 80 90 2 1 2 1 4 3 4 3 AV 1 1 2 1 1 1 2 2 1 4 1 AU 2 1 AF Thread Rc (PT) NPT G (PF) N F AR Note 1) Tank

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

ZSE F/ISE

Goes to 2. OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Series IDG

Note 2) Note 2) Flow direction (rightleft) R S Standard equipment With dew point indicator In case of two or more options, indicate them in an alphabetical order.

Air-hydro Unit

Combinations Converter nominal size Control valve Valve unit size Combined valve 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0 1 2 3 0 1 2 3 0 1 2 0 1 2 S 63 Speed controller Combined valve (Stop valve, Skip valve) The stop valve for intermediate stopping and the skip valve for last-forwarding are compound integrated