VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

0.4

EXH port] C10: 10 One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

1

) 85 53 254 110 78 279 85 53 256 110 78 281 R Series MGG only Stroke ML MT MH + Stroke Y + Stroke ZZ + 2 strokes Series MGC 20 to 50 Width across flats MA MM A Port B Port MD 10 A A Port B Port A 10 (MI) View A-A Front mounting flange R Stroke ML MT Y + Stroke MH + Stroke ZZ + 2 stroke Series MGP MGPM, MGPL Common Dimensions MB MC (Width across flats) Bore size (mm) MA MB MC MH ML MD MP

TABLE OF CONTENTS

A Three Way Valve or a Two Way Normally Open Valve is operating at a high cycle rate (greater than 200 C.P.M.) 4. A Three Way Valve or a Two Way Normally Open Valve is operating at a long duty cycle (such as On Time=1 hour, Off Time = 10 minutes) 5.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Modular F.R.L. Unit

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Color Description No.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/surge voltage suppressor) Applicable connector: 26 pins MIL type

MY1

MY1HT50/63 R L L R L R L R L R Slide table operating direction 8-11-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8-11-10 11 Basic Type Series MY1B MX MTS MY 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

VFR

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/Surge voltage suppressor) Applicable connector: 26 pins MIL type

VM

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

auto switch A 62.2 72.2 75 85 88 98 Bore size (mm) Without auto switch With auto switch A 53 63 64.5 74.5 76 86 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Dimensions except A, L and L1 are the same as rod side flange style.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

H : About 600 (Lead wire length) 4 5 91.7(GZ:93.1) [95.1] 19.5 1.5 78.8(GZ:80.2) [82.2] 17 33 5 R P 53.9(GZ:54.6) [55.6] 52.9(GZ:53.6) [54.6] 7 10 A P R A A A A 14 11 10 29 32 R B B B B B R 6-M5 0.8 (P, R port) 23.5 (Mounting holes) 2n-M3 0.5 (A, B port) (Pitch) P=10.5 9 Manual override L2 3.5 L1 (Non-locking) Manual override 42 [48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type

VFS

Symbol 02 03 A, B P D Nil D side mounting None 01T, 10 1 4 Rc Rc Rc M Mixed 3 8 1 2 U 01C, 01F U side mounting Stations Symbol Porting specifications (A, B) 02 Passage 2 stations Symbol R1, R2 P 10 10 stations 1 Side 2 Bottom Common Common Base type 01T, 10: 2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

CJ2

Material: Iron CD(cd) 3.3 5 MM M4 x 0.7 M5 x 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 GB 18 23 H 20 20 KA 4.2 5.2 CX 3.2 6.5 A 15 15 BA 12 18.3 BB 12 18.3 CA 14 20 CB 14 20 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Stability of suction position,

65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S